Automated Frequency and Quality Factor Mismatch Compensation Method for MEMS Rate Integrating Gyroscope

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

This paper reports an automated mismatch compensation method for a rate integrating gyroscope (RIG). The eigenmodes of an ideal degenerated resonator are clockwise (CW) and counterclockwise (CCW) modes, which are independent each other. However, the frequency and Q-factor mismatches of the resonator, which are generally unavoidable because of fabrication imperfectness, entangles these eigenmodes. This cross-coupling effect between CW and CCW modes deteriorate the linearity and causes the angle locking [1]. Thus, in this paper, a method to detects the cross-coupling terms (i.e. the frequency and Q mismatches) and tunes the driving signals to compensate these mismatches was proposed. The proposed method was experimentally confirmed using an electromagnetic ring resonator. The cross-coupling terms, which come from the frequency and Q-factor mismatches, were reduced to be 3 orders of magnitude by this method.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1831-1834
Number of pages4
ISBN (Electronic)9781728120072
DOIs
Publication statusPublished - 2019 Jun
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: 2019 Jun 232019 Jun 27

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country/TerritoryGermany
CityBerlin
Period19/6/2319/6/27

Keywords

  • Automatic Tuning
  • MEMS Gyroscope
  • Mode Mismatch Compensation
  • Rate Integrating Gyroscope

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Spectroscopy
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

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