Automated Frequency and Quality Factor Mismatch Compensation Method for MEMS Rate Integrating Gyroscope

Takashiro Tsukamoto; Shuji Tanaka

doi:10.1109/TRANSDUCERS.2019.8808513

Automated Frequency and Quality Factor Mismatch Compensation Method for MEMS Rate Integrating Gyroscope

Takashiro Tsukamoto, Shuji Tanaka

ENG - Robotics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This paper reports an automated mismatch compensation method for a rate integrating gyroscope (RIG). The eigenmodes of an ideal degenerated resonator are clockwise (CW) and counterclockwise (CCW) modes, which are independent each other. However, the frequency and Q-factor mismatches of the resonator, which are generally unavoidable because of fabrication imperfectness, entangles these eigenmodes. This cross-coupling effect between CW and CCW modes deteriorate the linearity and causes the angle locking [1]. Thus, in this paper, a method to detects the cross-coupling terms (i.e. the frequency and Q mismatches) and tunes the driving signals to compensate these mismatches was proposed. The proposed method was experimentally confirmed using an electromagnetic ring resonator. The cross-coupling terms, which come from the frequency and Q-factor mismatches, were reduced to be 3 orders of magnitude by this method.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1831-1834
Number of pages	4
ISBN (Electronic)	9781728120072
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808513
Publication status	Published - 2019 Jun
Event	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany Duration: 2019 Jun 23 → 2019 Jun 27

Publication series

Name	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country	Germany
City	Berlin
Period	19/6/23 → 19/6/27

Keywords

Automatic Tuning
MEMS Gyroscope
Mode Mismatch Compensation
Rate Integrating Gyroscope

ASJC Scopus subject areas

Process Chemistry and Technology
Spectroscopy
Electrical and Electronic Engineering
Mechanical Engineering
Electronic, Optical and Magnetic Materials
Control and Optimization
Instrumentation

Access to Document

10.1109/TRANSDUCERS.2019.8808513

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Cite this

Tsukamoto, T., & Tanaka, S. (2019). Automated Frequency and Quality Factor Mismatch Compensation Method for MEMS Rate Integrating Gyroscope. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 1831-1834). [8808513] (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808513

Automated Frequency and Quality Factor Mismatch Compensation Method for MEMS Rate Integrating Gyroscope. / Tsukamoto, Takashiro ; Tanaka, Shuji.

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. p. 1831-1834 8808513 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tsukamoto, T & Tanaka, S 2019, Automated Frequency and Quality Factor Mismatch Compensation Method for MEMS Rate Integrating Gyroscope. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808513, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Institute of Electrical and Electronics Engineers Inc., pp. 1831-1834, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany, 19/6/23. https://doi.org/10.1109/TRANSDUCERS.2019.8808513

Tsukamoto T , Tanaka S. Automated Frequency and Quality Factor Mismatch Compensation Method for MEMS Rate Integrating Gyroscope. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc. 2019. p. 1831-1834. 8808513. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). https://doi.org/10.1109/TRANSDUCERS.2019.8808513

Tsukamoto, Takashiro ; Tanaka, Shuji. / Automated Frequency and Quality Factor Mismatch Compensation Method for MEMS Rate Integrating Gyroscope. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 1831-1834 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

@inproceedings{b94232ede3c54fcc85cd8406eb25e002,

title = "Automated Frequency and Quality Factor Mismatch Compensation Method for MEMS Rate Integrating Gyroscope",

abstract = "This paper reports an automated mismatch compensation method for a rate integrating gyroscope (RIG). The eigenmodes of an ideal degenerated resonator are clockwise (CW) and counterclockwise (CCW) modes, which are independent each other. However, the frequency and Q-factor mismatches of the resonator, which are generally unavoidable because of fabrication imperfectness, entangles these eigenmodes. This cross-coupling effect between CW and CCW modes deteriorate the linearity and causes the angle locking [1]. Thus, in this paper, a method to detects the cross-coupling terms (i.e. the frequency and Q mismatches) and tunes the driving signals to compensate these mismatches was proposed. The proposed method was experimentally confirmed using an electromagnetic ring resonator. The cross-coupling terms, which come from the frequency and Q-factor mismatches, were reduced to be 3 orders of magnitude by this method.",

keywords = "Automatic Tuning, MEMS Gyroscope, Mode Mismatch Compensation, Rate Integrating Gyroscope",

author = "Takashiro Tsukamoto and Shuji Tanaka",

year = "2019",

month = jun,

doi = "10.1109/TRANSDUCERS.2019.8808513",

language = "English",

series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1831--1834",

booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

note = "20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII ; Conference date: 23-06-2019 Through 27-06-2019",

}

TY - GEN

T1 - Automated Frequency and Quality Factor Mismatch Compensation Method for MEMS Rate Integrating Gyroscope

AU - Tsukamoto, Takashiro

AU - Tanaka, Shuji

PY - 2019/6

Y1 - 2019/6

N2 - This paper reports an automated mismatch compensation method for a rate integrating gyroscope (RIG). The eigenmodes of an ideal degenerated resonator are clockwise (CW) and counterclockwise (CCW) modes, which are independent each other. However, the frequency and Q-factor mismatches of the resonator, which are generally unavoidable because of fabrication imperfectness, entangles these eigenmodes. This cross-coupling effect between CW and CCW modes deteriorate the linearity and causes the angle locking [1]. Thus, in this paper, a method to detects the cross-coupling terms (i.e. the frequency and Q mismatches) and tunes the driving signals to compensate these mismatches was proposed. The proposed method was experimentally confirmed using an electromagnetic ring resonator. The cross-coupling terms, which come from the frequency and Q-factor mismatches, were reduced to be 3 orders of magnitude by this method.

AB - This paper reports an automated mismatch compensation method for a rate integrating gyroscope (RIG). The eigenmodes of an ideal degenerated resonator are clockwise (CW) and counterclockwise (CCW) modes, which are independent each other. However, the frequency and Q-factor mismatches of the resonator, which are generally unavoidable because of fabrication imperfectness, entangles these eigenmodes. This cross-coupling effect between CW and CCW modes deteriorate the linearity and causes the angle locking [1]. Thus, in this paper, a method to detects the cross-coupling terms (i.e. the frequency and Q mismatches) and tunes the driving signals to compensate these mismatches was proposed. The proposed method was experimentally confirmed using an electromagnetic ring resonator. The cross-coupling terms, which come from the frequency and Q-factor mismatches, were reduced to be 3 orders of magnitude by this method.

KW - Automatic Tuning

KW - MEMS Gyroscope

KW - Mode Mismatch Compensation

KW - Rate Integrating Gyroscope

UR - http://www.scopus.com/inward/record.url?scp=85071922921&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85071922921&partnerID=8YFLogxK

U2 - 10.1109/TRANSDUCERS.2019.8808513

DO - 10.1109/TRANSDUCERS.2019.8808513

M3 - Conference contribution

AN - SCOPUS:85071922921

T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

SP - 1831

EP - 1834

BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Y2 - 23 June 2019 through 27 June 2019

ER -