TY - GEN
T1 - Automated Frequency and Quality Factor Mismatch Compensation Method for MEMS Rate Integrating Gyroscope
AU - Tsukamoto, Takashiro
AU - Tanaka, Shuji
PY - 2019/6
Y1 - 2019/6
N2 - This paper reports an automated mismatch compensation method for a rate integrating gyroscope (RIG). The eigenmodes of an ideal degenerated resonator are clockwise (CW) and counterclockwise (CCW) modes, which are independent each other. However, the frequency and Q-factor mismatches of the resonator, which are generally unavoidable because of fabrication imperfectness, entangles these eigenmodes. This cross-coupling effect between CW and CCW modes deteriorate the linearity and causes the angle locking [1]. Thus, in this paper, a method to detects the cross-coupling terms (i.e. the frequency and Q mismatches) and tunes the driving signals to compensate these mismatches was proposed. The proposed method was experimentally confirmed using an electromagnetic ring resonator. The cross-coupling terms, which come from the frequency and Q-factor mismatches, were reduced to be 3 orders of magnitude by this method.
AB - This paper reports an automated mismatch compensation method for a rate integrating gyroscope (RIG). The eigenmodes of an ideal degenerated resonator are clockwise (CW) and counterclockwise (CCW) modes, which are independent each other. However, the frequency and Q-factor mismatches of the resonator, which are generally unavoidable because of fabrication imperfectness, entangles these eigenmodes. This cross-coupling effect between CW and CCW modes deteriorate the linearity and causes the angle locking [1]. Thus, in this paper, a method to detects the cross-coupling terms (i.e. the frequency and Q mismatches) and tunes the driving signals to compensate these mismatches was proposed. The proposed method was experimentally confirmed using an electromagnetic ring resonator. The cross-coupling terms, which come from the frequency and Q-factor mismatches, were reduced to be 3 orders of magnitude by this method.
KW - Automatic Tuning
KW - MEMS Gyroscope
KW - Mode Mismatch Compensation
KW - Rate Integrating Gyroscope
UR - http://www.scopus.com/inward/record.url?scp=85071922921&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85071922921&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2019.8808513
DO - 10.1109/TRANSDUCERS.2019.8808513
M3 - Conference contribution
AN - SCOPUS:85071922921
T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
SP - 1831
EP - 1834
BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Y2 - 23 June 2019 through 27 June 2019
ER -