AUSN solder vacuum packaging using melted solder floodgates and laser-activated non-evaporable getters for SIC diaphragm anticorrosive vacuum sensors

Shuji Tanaka, Yutaka Honjoya, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

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Physics & Astronomy

Chemical Compounds

Engineering & Materials Science