Atomically resolved surface structure of SrTiO3(001) thin films grown in step-flow mode by pulsed laser deposition

Katsuya Iwaya, Takeo Ohsawa, Ryota Shimizu, Tomihiro Hashizume, Taro Hitosugi

    Research output: Contribution to journalArticlepeer-review

    15 Citations (Scopus)

    Abstract

    The surface structure of SrTiO3(001) thin films homoepitaxially grown in step-flow mode by pulsed laser deposition was characterized using scanning tunneling microscopy. One-dimensional (1D) TiOx -based nanostructures were formed on the surface, and their density increased with increasing film thickness. Most of the 1D nanostructures disappeared after post-deposition annealing, and the resulting surface exhibited a domain structure with (2 × 1) and (1 × 2) reconstructions and fewer oxygen vacancies. These results imply that the step-flow growth is likely to produce a TiOx -rich surface and Ti deficiencies in the film, and that annealing can effectively reduce the density of atomic defects.

    Original languageEnglish
    Article number075701
    JournalApplied Physics Express
    Volume3
    Issue number7
    DOIs
    Publication statusPublished - 2010 Jul

    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy(all)

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