Atomically resolved surface structure of SrTiO3(001) thin films grown in step-flow mode by pulsed laser deposition

Katsuya Iwaya; Takeo Ohsawa; Ryota Shimizu; Tomihiro Hashizume; Taro Hitosugi

doi:10.1143/APEX.3.075701

Atomically resolved surface structure of SrTiO₃(001) thin films grown in step-flow mode by pulsed laser deposition

Katsuya Iwaya, Takeo Ohsawa, Ryota Shimizu, Tomihiro Hashizume, Taro Hitosugi

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

The surface structure of SrTiO₃(001) thin films homoepitaxially grown in step-flow mode by pulsed laser deposition was characterized using scanning tunneling microscopy. One-dimensional (1D) TiOx -based nanostructures were formed on the surface, and their density increased with increasing film thickness. Most of the 1D nanostructures disappeared after post-deposition annealing, and the resulting surface exhibited a domain structure with (2 × 1) and (1 × 2) reconstructions and fewer oxygen vacancies. These results imply that the step-flow growth is likely to produce a TiO_x -rich surface and Ti deficiencies in the film, and that annealing can effectively reduce the density of atomic defects.

Original language	English
Article number	075701
Journal	Applied Physics Express
Volume	3
Issue number	7
DOIs	https://doi.org/10.1143/APEX.3.075701
Publication status	Published - 2010 Jul

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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abstract = "The surface structure of SrTiO3(001) thin films homoepitaxially grown in step-flow mode by pulsed laser deposition was characterized using scanning tunneling microscopy. One-dimensional (1D) TiOx -based nanostructures were formed on the surface, and their density increased with increasing film thickness. Most of the 1D nanostructures disappeared after post-deposition annealing, and the resulting surface exhibited a domain structure with (2 × 1) and (1 × 2) reconstructions and fewer oxygen vacancies. These results imply that the step-flow growth is likely to produce a TiOx -rich surface and Ti deficiencies in the film, and that annealing can effectively reduce the density of atomic defects.",

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AU - Iwaya, Katsuya

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AU - Hashizume, Tomihiro

AU - Hitosugi, Taro

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AB - The surface structure of SrTiO3(001) thin films homoepitaxially grown in step-flow mode by pulsed laser deposition was characterized using scanning tunneling microscopy. One-dimensional (1D) TiOx -based nanostructures were formed on the surface, and their density increased with increasing film thickness. Most of the 1D nanostructures disappeared after post-deposition annealing, and the resulting surface exhibited a domain structure with (2 × 1) and (1 × 2) reconstructions and fewer oxygen vacancies. These results imply that the step-flow growth is likely to produce a TiOx -rich surface and Ti deficiencies in the film, and that annealing can effectively reduce the density of atomic defects.

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