Atomically-resolved imaging by frequency-modulation atomic force microscopy using a quartz length-extension resonator

Toshu An; Toyoaki Eguchi; Kotone Akiyama; Yukio Hasegawa

doi:10.1063/1.2061850

Atomically-resolved imaging by frequency-modulation atomic force microscopy using a quartz length-extension resonator

Toshu An, Toyoaki Eguchi, Kotone Akiyama, Yukio Hasegawa

Research output: Contribution to journal › Article › peer-review

42 Citations (Scopus)

Abstract

Using a 1 MHz length-extension type of quartz resonator as a force sensor for frequency-modulation atomic force microscopy (AFM), atomically resolved images of the Si (111) - (7×7) surface was obtained. Fabrications of a tip attached at the front end of the resonator by focused ion beam, and removal of the native oxide layer on the tip by in-situ field ion microscopy are found effective for achieving the highly-resolved AFM imaging.

Original language	English
Article number	133114
Pages (from-to)	1-3
Number of pages	3
Journal	Applied Physics Letters
Volume	87
Issue number	13
DOIs	https://doi.org/10.1063/1.2061850
Publication status	Published - 2005 Sept 26
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.2061850

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abstract = "Using a 1 MHz length-extension type of quartz resonator as a force sensor for frequency-modulation atomic force microscopy (AFM), atomically resolved images of the Si (111) - (7×7) surface was obtained. Fabrications of a tip attached at the front end of the resonator by focused ion beam, and removal of the native oxide layer on the tip by in-situ field ion microscopy are found effective for achieving the highly-resolved AFM imaging.",

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AU - Eguchi, Toyoaki

AU - Akiyama, Kotone

AU - Hasegawa, Yukio

PY - 2005/9/26

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AB - Using a 1 MHz length-extension type of quartz resonator as a force sensor for frequency-modulation atomic force microscopy (AFM), atomically resolved images of the Si (111) - (7×7) surface was obtained. Fabrications of a tip attached at the front end of the resonator by focused ion beam, and removal of the native oxide layer on the tip by in-situ field ion microscopy are found effective for achieving the highly-resolved AFM imaging.

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Atomically-resolved imaging by frequency-modulation atomic force microscopy using a quartz length-extension resonator

Abstract

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