Atomically-resolved imaging by frequency-modulation atomic force microscopy using a quartz length-extension resonator

Toshu An, Toyoaki Eguchi, Kotone Akiyama, Yukio Hasegawa

Research output: Contribution to journalArticlepeer-review

34 Citations (Scopus)

Abstract

Using a 1 MHz length-extension type of quartz resonator as a force sensor for frequency-modulation atomic force microscopy (AFM), atomically resolved images of the Si (111) - (7×7) surface was obtained. Fabrications of a tip attached at the front end of the resonator by focused ion beam, and removal of the native oxide layer on the tip by in-situ field ion microscopy are found effective for achieving the highly-resolved AFM imaging.

Original languageEnglish
Article number133114
Pages (from-to)1-3
Number of pages3
JournalApplied Physics Letters
Volume87
Issue number13
DOIs
Publication statusPublished - 2005 Sep 26
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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