Atomically Controlled Technology for Future Si-Based Devices

Junichi Murota, Masao Sakuraba, Bernd Tillack

Research output: Contribution to journalConference articlepeer-review

16 Citations (Scopus)


One of the main requirements for Si-based Ultrasmail device is atomic-order control of process technology. Here we show the concept of atomic-level processing based on atomic-order surface reaction control. The main idea of the atomic layer approach is the separation of the surface adsorption of reactant gases from the reaction process. Self-limiting formation of 1-3 atomic layers of group IV or related atoms in the thermal adsorption and reaction of hydride gases (SiH4, GeH4, NH3, PH3, CH4 and SiH3CH3) on Si(100) and Ge(100) are generalized based on the Langmuir-type model. Si or SiGe epitaxial growth over the N, P and B layer already-formed on Si(100) or SiGe(100) surface is achieved. It is found that higher level of electrical P atoms exist in such film, compared with doping under thermal equilibrium conditions. Furthermore, the capability of atomically controlled processing for doping of advanced devices with critical requirements for dose and location control is demonstrated for the base doping of SiGe:C heterojunction bipolar transistors (HBTs). These results open the way to atomically controlled technology for ultra-large-scale integrations.

Original languageEnglish
Pages (from-to)607-616
Number of pages10
JournalSolid State Phenomena
Publication statusPublished - 2004 Jan 1
EventGettering and Defect Engineering in Semiconductor Technology GADEST 2003: Proceedings of the 10th International Autumn Meeting - Brandenburg, Germany
Duration: 2003 Sep 212003 Sep 26


  • Atomic Layer Doping
  • Bipolar Transistor HBT
  • Chemical Vapor Deposition Heterojunction
  • Si-Based Group IV Semiconductor
  • SiGe:C
  • Ultra-Small Hetero-Devices

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics


Dive into the research topics of 'Atomically Controlled Technology for Future Si-Based Devices'. Together they form a unique fingerprint.

Cite this