Atomic structure of threading dislocations in AlN thin films

Yuki Tokumoto, Naoya Shibata, Teruyasu Mizoguhci, Takahisa Yamamoto, Yuichi Ikuhara

    Research output: Contribution to journalArticlepeer-review

    2 Citations (Scopus)

    Abstract

    The core structure of threading dislocations in AlN films was investigated by atomic-resolution scanning transmission electron microscopy. The threading dislocations in the AlN films were found to be mostly edge-type perfect dislocations. It was directly revealed that the edge dislocation core has the 8-atom ring structure which is an energetically favorable structure predicted by previous theoretical studies.

    Original languageEnglish
    Pages (from-to)4886-4888
    Number of pages3
    JournalPhysica B: Condensed Matter
    Volume404
    Issue number23-24
    DOIs
    Publication statusPublished - 2009 Dec 15

    Keywords

    • AlN
    • Dislocations
    • HAADF-STEM

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Electrical and Electronic Engineering

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