Atomic structure of threading dislocations in AlN thin films

Yuki Tokumoto, Naoya Shibata, Teruyasu Mizoguhci, Takahisa Yamamoto, Yuichi Ikuhara

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


The core structure of threading dislocations in AlN films was investigated by atomic-resolution scanning transmission electron microscopy. The threading dislocations in the AlN films were found to be mostly edge-type perfect dislocations. It was directly revealed that the edge dislocation core has the 8-atom ring structure which is an energetically favorable structure predicted by previous theoretical studies.

Original languageEnglish
Pages (from-to)4886-4888
Number of pages3
JournalPhysica B: Condensed Matter
Issue number23-24
Publication statusPublished - 2009 Dec 15
Externally publishedYes


  • AlN
  • Dislocations

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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