Atomic structure of threading dislocations in AlN thin films

Yuki Tokumoto; Naoya Shibata; Teruyasu Mizoguhci; Takahisa Yamamoto; Yuichi Ikuhara

doi:10.1016/j.physb.2009.08.254

Atomic structure of threading dislocations in AlN thin films

Yuki Tokumoto, Naoya Shibata, Teruyasu Mizoguhci, Takahisa Yamamoto, Yuichi Ikuhara

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

The core structure of threading dislocations in AlN films was investigated by atomic-resolution scanning transmission electron microscopy. The threading dislocations in the AlN films were found to be mostly edge-type perfect dislocations. It was directly revealed that the edge dislocation core has the 8-atom ring structure which is an energetically favorable structure predicted by previous theoretical studies.

Original language	English
Pages (from-to)	4886-4888
Number of pages	3
Journal	Physica B: Condensed Matter
Volume	404
Issue number	23-24
DOIs	https://doi.org/10.1016/j.physb.2009.08.254
Publication status	Published - 2009 Dec 15
Externally published	Yes

Keywords

AlN
Dislocations
HAADF-STEM

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1016/j.physb.2009.08.254

Cite this

@article{d7605d0dee784eac9cfc5bb81f6215b0,

title = "Atomic structure of threading dislocations in AlN thin films",

abstract = "The core structure of threading dislocations in AlN films was investigated by atomic-resolution scanning transmission electron microscopy. The threading dislocations in the AlN films were found to be mostly edge-type perfect dislocations. It was directly revealed that the edge dislocation core has the 8-atom ring structure which is an energetically favorable structure predicted by previous theoretical studies.",

keywords = "AlN, Dislocations, HAADF-STEM",

author = "Yuki Tokumoto and Naoya Shibata and Teruyasu Mizoguhci and Takahisa Yamamoto and Yuichi Ikuhara",

note = "Funding Information: This work was supported in part by the Grant-in-Aid for Scientific Research on Priority Areas Nano Materials Science for Atomic-scale Modification 474 from the Ministry of Education, Culture, Sports and Technology (MEXT) of Japan . Y.T. was supported as a Japan Society for the Promotion of Science (JSPS) research fellow. Y.T. acknowledges financial support received from the Kazato Research Foundation, Japan . N.S. acknowledges support from PRESTO, Japan Science and Technology Agency .",

year = "2009",

month = dec,

day = "15",

doi = "10.1016/j.physb.2009.08.254",

language = "English",

volume = "404",

pages = "4886--4888",

journal = "Physica B: Condensed Matter",

issn = "0921-4526",

publisher = "Elsevier",

number = "23-24",

}

TY - JOUR

T1 - Atomic structure of threading dislocations in AlN thin films

AU - Tokumoto, Yuki

AU - Shibata, Naoya

AU - Mizoguhci, Teruyasu

AU - Yamamoto, Takahisa

AU - Ikuhara, Yuichi

N1 - Funding Information: This work was supported in part by the Grant-in-Aid for Scientific Research on Priority Areas Nano Materials Science for Atomic-scale Modification 474 from the Ministry of Education, Culture, Sports and Technology (MEXT) of Japan . Y.T. was supported as a Japan Society for the Promotion of Science (JSPS) research fellow. Y.T. acknowledges financial support received from the Kazato Research Foundation, Japan . N.S. acknowledges support from PRESTO, Japan Science and Technology Agency .

PY - 2009/12/15

Y1 - 2009/12/15

N2 - The core structure of threading dislocations in AlN films was investigated by atomic-resolution scanning transmission electron microscopy. The threading dislocations in the AlN films were found to be mostly edge-type perfect dislocations. It was directly revealed that the edge dislocation core has the 8-atom ring structure which is an energetically favorable structure predicted by previous theoretical studies.

AB - The core structure of threading dislocations in AlN films was investigated by atomic-resolution scanning transmission electron microscopy. The threading dislocations in the AlN films were found to be mostly edge-type perfect dislocations. It was directly revealed that the edge dislocation core has the 8-atom ring structure which is an energetically favorable structure predicted by previous theoretical studies.

KW - AlN

KW - Dislocations

KW - HAADF-STEM

UR - http://www.scopus.com/inward/record.url?scp=74349094163&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=74349094163&partnerID=8YFLogxK

U2 - 10.1016/j.physb.2009.08.254

DO - 10.1016/j.physb.2009.08.254

M3 - Article

AN - SCOPUS:74349094163

SN - 0921-4526

VL - 404

SP - 4886

EP - 4888

JO - Physica B: Condensed Matter

JF - Physica B: Condensed Matter

IS - 23-24

ER -

Atomic structure of threading dislocations in AlN thin films

Abstract

Keywords

ASJC Scopus subject areas

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