The core structure of threading dislocations in AlN films was investigated by atomic-resolution scanning transmission electron microscopy. The threading dislocations in the AlN films were found to be mostly edge-type perfect dislocations. It was directly revealed that the edge dislocation core has the 8-atom ring structure which is an energetically favorable structure predicted by previous theoretical studies.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering