Atomic structure of SiO2 at SiO2/Si interfaces

K. Hirose, H. Nohira, K. Sakano, T. Hattori

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    7 Citations (Scopus)

    Abstract

    The valence-band and O 2s core-level spectra of ultrathin (about 1 nm) SiO2 layers formed in the initial stages of the oxidation of Si(100) substrates were measured by high-resolution X-ray photoelectron spectroscopy (XPS), and the energy difference between the bonding states in the valence-band and the core-level was found to be larger than the corresponding difference for the bulk SiO2. The energy difference between the top of the valence-band and the core-level was also found to be larger than that for the bulk SiO2. From the first-principle molecular orbital (MO) calculations for SiO2 model clusters, (Si5O16H12), it was concluded that the atomic structure of SiO2 at the SiO2/Si interfaces is characterized by a narrow intertetrahedral bond angle, about 135°.

    Original languageEnglish
    Pages (from-to)455-459
    Number of pages5
    JournalApplied Surface Science
    Volume166
    Issue number1
    DOIs
    Publication statusPublished - 2000 Oct 9

    ASJC Scopus subject areas

    • Chemistry(all)
    • Condensed Matter Physics
    • Physics and Astronomy(all)
    • Surfaces and Interfaces
    • Surfaces, Coatings and Films

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