Atomic collision effects during PLD processes: Nonstoichiometry control in transparent superconductors

Taro Hitosugi; D. Packwood; S. Shiraki

doi:10.1117/12.2045551

Atomic collision effects during PLD processes: Nonstoichiometry control in transparent superconductors

Taro Hitosugi, D. Packwood, S. Shiraki

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

The pulsed laser deposition (PLD) growth processes of spinel lithium titanates, Li₄Ti₅O₁₂ and LiTi₂O ₄, on MgAl₂O₄ (111) substrates are investigated. Although a Li₄Ti₅O₁₂ target was used for the depositions, the Li/Ti atomic ratio of the species arriving at the substrate during deposition was only ∼0.5, enabling high quality LiTi ₂O₄ films to be prepared with a rocking curve full-width at half-maximum of ∼0.05°. The LiTi₂O₄ epitaxial thin films exhibited high conductivity at room temperature (∼3.0 × 10³ Ω^-1cm^-1) and a superconducting transition temperature of ∼13.3 K. These values are the highest recorded for epitaxial thin films. Moreover, the effect of collisions between the atoms in a plume were studied quantitatively. These results demonstrate the importance of the target composition, providing further insight into Licontaining metal-oxide deposition processes using PLD.

Original language	English
Title of host publication	Oxide-Based Materials and Devices V
Publisher	SPIE
ISBN (Print)	9780819499004
DOIs	https://doi.org/10.1117/12.2045551
Publication status	Published - 2014
Event	5th Annual Oxide Based Materials and Devices Conference - San Francisco, CA, United States Duration: 2014 Feb 2 → 2014 Feb 5

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	8987
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Other

Other	5th Annual Oxide Based Materials and Devices Conference
Country	United States
City	San Francisco, CA
Period	14/2/2 → 14/2/5

Keywords

Collision
Growth process
Pulsed laser deposition (PLD) transparent superconductor
Spinel
Stochastic process

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.2045551

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Atomic collision effects during PLD processes : Nonstoichiometry control in transparent superconductors. / Hitosugi, Taro; Packwood, D.; Shiraki, S.

Oxide-Based Materials and Devices V. SPIE, 2014. 89870U (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8987).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hitosugi, T, Packwood, D & Shiraki, S 2014, Atomic collision effects during PLD processes: Nonstoichiometry control in transparent superconductors. in Oxide-Based Materials and Devices V., 89870U, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8987, SPIE, 5th Annual Oxide Based Materials and Devices Conference, San Francisco, CA, United States, 14/2/2. https://doi.org/10.1117/12.2045551

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abstract = "The pulsed laser deposition (PLD) growth processes of spinel lithium titanates, Li4Ti5O12 and LiTi2O 4, on MgAl2O4 (111) substrates are investigated. Although a Li4Ti5O12 target was used for the depositions, the Li/Ti atomic ratio of the species arriving at the substrate during deposition was only ∼0.5, enabling high quality LiTi 2O4 films to be prepared with a rocking curve full-width at half-maximum of ∼0.05°. The LiTi2O4 epitaxial thin films exhibited high conductivity at room temperature (∼3.0 × 103 Ω-1cm-1) and a superconducting transition temperature of ∼13.3 K. These values are the highest recorded for epitaxial thin films. Moreover, the effect of collisions between the atoms in a plume were studied quantitatively. These results demonstrate the importance of the target composition, providing further insight into Licontaining metal-oxide deposition processes using PLD.",

keywords = "Collision, Growth process, Pulsed laser deposition (PLD) transparent superconductor, Spinel, Stochastic process",

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N2 - The pulsed laser deposition (PLD) growth processes of spinel lithium titanates, Li4Ti5O12 and LiTi2O 4, on MgAl2O4 (111) substrates are investigated. Although a Li4Ti5O12 target was used for the depositions, the Li/Ti atomic ratio of the species arriving at the substrate during deposition was only ∼0.5, enabling high quality LiTi 2O4 films to be prepared with a rocking curve full-width at half-maximum of ∼0.05°. The LiTi2O4 epitaxial thin films exhibited high conductivity at room temperature (∼3.0 × 103 Ω-1cm-1) and a superconducting transition temperature of ∼13.3 K. These values are the highest recorded for epitaxial thin films. Moreover, the effect of collisions between the atoms in a plume were studied quantitatively. These results demonstrate the importance of the target composition, providing further insight into Licontaining metal-oxide deposition processes using PLD.

AB - The pulsed laser deposition (PLD) growth processes of spinel lithium titanates, Li4Ti5O12 and LiTi2O 4, on MgAl2O4 (111) substrates are investigated. Although a Li4Ti5O12 target was used for the depositions, the Li/Ti atomic ratio of the species arriving at the substrate during deposition was only ∼0.5, enabling high quality LiTi 2O4 films to be prepared with a rocking curve full-width at half-maximum of ∼0.05°. The LiTi2O4 epitaxial thin films exhibited high conductivity at room temperature (∼3.0 × 103 Ω-1cm-1) and a superconducting transition temperature of ∼13.3 K. These values are the highest recorded for epitaxial thin films. Moreover, the effect of collisions between the atoms in a plume were studied quantitatively. These results demonstrate the importance of the target composition, providing further insight into Licontaining metal-oxide deposition processes using PLD.

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