@inproceedings{1df89ae23c0048f881b97a01d6ca8cba,
title = "Atomic collision effects during PLD processes: Nonstoichiometry control in transparent superconductors",
abstract = "The pulsed laser deposition (PLD) growth processes of spinel lithium titanates, Li4Ti5O12 and LiTi2O 4, on MgAl2O4 (111) substrates are investigated. Although a Li4Ti5O12 target was used for the depositions, the Li/Ti atomic ratio of the species arriving at the substrate during deposition was only ∼0.5, enabling high quality LiTi 2O4 films to be prepared with a rocking curve full-width at half-maximum of ∼0.05°. The LiTi2O4 epitaxial thin films exhibited high conductivity at room temperature (∼3.0 × 103 Ω-1cm-1) and a superconducting transition temperature of ∼13.3 K. These values are the highest recorded for epitaxial thin films. Moreover, the effect of collisions between the atoms in a plume were studied quantitatively. These results demonstrate the importance of the target composition, providing further insight into Licontaining metal-oxide deposition processes using PLD.",
keywords = "Collision, Growth process, Pulsed laser deposition (PLD) transparent superconductor, Spinel, Stochastic process",
author = "Taro Hitosugi and D. Packwood and S. Shiraki",
year = "2014",
doi = "10.1117/12.2045551",
language = "English",
isbn = "9780819499004",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
booktitle = "Oxide-Based Materials and Devices V",
note = "5th Annual Oxide Based Materials and Devices Conference ; Conference date: 02-02-2014 Through 05-02-2014",
}