Atom probe analysis of sputtered Co-Cr magnetic thin films

K. Hono, Y. Maeda, J. L. Li, T. Sakurai

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


Both Co-22at%Cr bulk alloy and its thin films were analyzed by an atom probe field ion microscope. While no compositional inhomogeneity was found in the bulk sample, a significant compositional fluctuation was found in the Co-Cr thin film sample which was deposited on a tungsten tip surface at 200°C. The concentration of the Cr enriched region was in the range of 30-40 at% Cr, while that of the Cr depleted region was in the range of 5-10 at% Cr.

Original languageEnglish
Pages (from-to)386-390
Number of pages5
JournalApplied Surface Science
Issue number1-4
Publication statusPublished - 1993 Apr 2
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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