Atom probe analysis of sputtered Co-Cr magnetic thin films

K. Hono, Y. Maeda, J. L. Li, Toshio Sakurai

    Research output: Contribution to journalArticle

    3 Citations (Scopus)

    Abstract

    Both Co-22at%Cr bulk alloy and its thin films were analyzed by an atom probe field ion microscope. While no compositional inhomogeneity was found in the bulk sample, a significant compositional fluctuation was found in the Co-Cr thin film sample which was deposited on a tungsten tip surface at 200°C. The concentration of the Cr enriched region was in the range of 30-40 at% Cr, while that of the Cr depleted region was in the range of 5-10 at% Cr.

    Original languageEnglish
    Pages (from-to)386-390
    Number of pages5
    JournalApplied Surface Science
    Volume67
    Issue number1-4
    DOIs
    Publication statusPublished - 1993 Apr 2

    ASJC Scopus subject areas

    • Surfaces, Coatings and Films

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