Atom probe analysis of a nanocrystalline Fe-C-Ta sputtered soft magnetic thin film

K. Hono, N. Hasegawa, S. S. Babu, H. Fujimori, T. Sakurai

    Research output: Contribution to journalArticlepeer-review

    11 Citations (Scopus)

    Abstract

    Sputtered Fe-10.3at%C-8.3at%Ta magnetic thin films annealed below 650°C were analyzed by the atom probe method in order to elucidate the mechanism of formation of the nanocrystalline structure. In the as-deposited amorphous film, evidence for significant variation of the carbon concentration was found. By annealing below the crystallization temperature, the degree of fluctuation of the carbon concentration appeared to be enhanced. After heat treatment for optimum soft magnetic properties, TaC was observed. In this condition, substantial amounts of supersaturated C and Ta were still dissolved in the α-Fe phase.

    Original languageEnglish
    Pages (from-to)391-397
    Number of pages7
    JournalApplied Surface Science
    Volume67
    Issue number1-4
    DOIs
    Publication statusPublished - 1993 Apr 2

    ASJC Scopus subject areas

    • Chemistry(all)
    • Condensed Matter Physics
    • Physics and Astronomy(all)
    • Surfaces and Interfaces
    • Surfaces, Coatings and Films

    Fingerprint Dive into the research topics of 'Atom probe analysis of a nanocrystalline Fe-C-Ta sputtered soft magnetic thin film'. Together they form a unique fingerprint.

    Cite this