Atom-by-Atom and Sheet-by-Sheet Chemical Mechanical Polishing of Diamond Assisted by OH Radicals: A Tight-Binding Quantum Chemical Molecular Dynamics Simulation Study

Engineering & Materials Science

• Chemical mechanical polishing 100%
• Molecular dynamics 86%
• Atoms 79%
• Diamonds 76%
• Computer simulation 41%
• Graphitization 12%
• Surface reconstruction 11%
• Surface structure 10%
• Single crystals 9%
• Desorption 9%
• Field effect transistors 9%
• Molecules 8%
• Oxidation 7%
• Hardness 6%
• Simulators 6%

Chemical Compounds

• Polishing 88%
• Molecular Dynamics 56%
• Simulation 48%
• Surface Reconstruction 11%
• Surface 10%
• Exfoliation 8%
• Field Effect 8%
• Surface Structure 8%
• Single Crystalline Solid 6%