Atmospheric plasma-calcination of mesoporous tungsten oxide utilizing plasma dielectric barrier discharge

P. Baroch, J. Hieda, N. Saito, O. Takai

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

The fabrication of mesoporous tungsten oxide films by spin-coating method followed by an atmospheric plasma-calcination method is described and discussed here. For the calcination process the dielectric barrier discharge system generating homogenous atmospheric plasma discharge was designed and used. By this method, large surface area mesoporous films, with disordered pores of average diameter size of about 4 to 5 nm were synthesized. All the plasma-calcined films exhibit amorphous structure. The process of calcination was evaluated by FT-IR spectroscopy and in comparison with other methods a very high speed of calcination process was achieved.

Original languageEnglish
Pages (from-to)4905-4908
Number of pages4
JournalThin Solid Films
Volume515
Issue number12
DOIs
Publication statusPublished - 2007 Apr 23

Keywords

  • Dielectric barrier discharge
  • Mesoporous tungsten oxide
  • Plasma-calcination
  • Spin-coating

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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