At wavelength observation of phase defect embedded in EUV mask using microscope technique

Tsuneo Terasawa, Tsuyoshi Amano, Takeshi Yamane, Hidehiro Watanabe, Mitsunori Toyoda, Tetsuo Harada, Takeo Watanabe, Hiroo Kinoshita

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

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Mathematics

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy