Assessment of lower-voltage TEM performance using 3D Fourier transform of through-focus series

Koji Kimoto, Keiji Kurashima, Takuro Nagai, Megumi Ohwada, Kazuo Ishizuka

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

We assess the imaging performance of a transmission electron microscopy (TEM) system operated at a relatively low acceleration voltage using the three-dimensional (3D) Fourier transform of through-focus images. Although a single diffractogram and the Thon diagram cannot distinguish between the linear and non-linear TEM imaging terms, the 3D Fourier transform allows us to evaluate linear imaging terms, resulting in a conclusive assessment of TEM performance. Using this method, information transfer up to 98. pm is demonstrated for an 80. kV TEM system equipped with a spherical aberration corrector and a monochromator. We also revisit the Young fringe method in the light of the 3D Fourier transform, and have found a considerable amount of non-linear terms in Young fringes at 80. kV even from a typical standard specimen, such as an amorphous Ge thin film.

Original languageEnglish
Pages (from-to)31-37
Number of pages7
JournalUltramicroscopy
Volume121
DOIs
Publication statusPublished - 2012 Oct

Keywords

  • High-resolution transmission electron microscopy
  • Information limit
  • Low acceleration voltage
  • Monochromator
  • Spherical aberration corrector
  • Young fringe

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

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