TY - JOUR
T1 - Assessment of lower-voltage TEM performance using 3D Fourier transform of through-focus series
AU - Kimoto, Koji
AU - Kurashima, Keiji
AU - Nagai, Takuro
AU - Ohwada, Megumi
AU - Ishizuka, Kazuo
N1 - Funding Information:
We thank Mr. Matsumoto, Dr. Bright, Mr. Horspool, Dr. Inoke, Mr. Kobayashi, Mr. Takahashi, Mr. Takauchi, Dr. van Cappellen, Dr. Lazar and Dr. Freitag for installing the new microscope, and Dr. Suenaga and Dr. Y. Sato for invaluable suggestions on lower-voltage TEM. We also thank Dr. Kawasaki and Dr. Taniguchi for suggestions on the defocus-image modulation processing, and Dr. Mitsuishi for useful comments on confocal microscopy. This study is partially supported by JST, Research acceleration program, Kakenhi , and NanoSupport program by MEXT .
PY - 2012/10
Y1 - 2012/10
N2 - We assess the imaging performance of a transmission electron microscopy (TEM) system operated at a relatively low acceleration voltage using the three-dimensional (3D) Fourier transform of through-focus images. Although a single diffractogram and the Thon diagram cannot distinguish between the linear and non-linear TEM imaging terms, the 3D Fourier transform allows us to evaluate linear imaging terms, resulting in a conclusive assessment of TEM performance. Using this method, information transfer up to 98. pm is demonstrated for an 80. kV TEM system equipped with a spherical aberration corrector and a monochromator. We also revisit the Young fringe method in the light of the 3D Fourier transform, and have found a considerable amount of non-linear terms in Young fringes at 80. kV even from a typical standard specimen, such as an amorphous Ge thin film.
AB - We assess the imaging performance of a transmission electron microscopy (TEM) system operated at a relatively low acceleration voltage using the three-dimensional (3D) Fourier transform of through-focus images. Although a single diffractogram and the Thon diagram cannot distinguish between the linear and non-linear TEM imaging terms, the 3D Fourier transform allows us to evaluate linear imaging terms, resulting in a conclusive assessment of TEM performance. Using this method, information transfer up to 98. pm is demonstrated for an 80. kV TEM system equipped with a spherical aberration corrector and a monochromator. We also revisit the Young fringe method in the light of the 3D Fourier transform, and have found a considerable amount of non-linear terms in Young fringes at 80. kV even from a typical standard specimen, such as an amorphous Ge thin film.
KW - High-resolution transmission electron microscopy
KW - Information limit
KW - Low acceleration voltage
KW - Monochromator
KW - Spherical aberration corrector
KW - Young fringe
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U2 - 10.1016/j.ultramic.2012.06.012
DO - 10.1016/j.ultramic.2012.06.012
M3 - Article
C2 - 22922529
AN - SCOPUS:84865507602
VL - 121
SP - 31
EP - 37
JO - Ultramicroscopy
JF - Ultramicroscopy
SN - 0304-3991
ER -