Assembled comb-drive XYZ-microstage with large displacements for low temperature measurement systems

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)

Abstract

In this research, we report the novel design, fabrication and testing of an assembled comb-drive XYZ-microstage that produces highly decoupled motions into X-, Y-, and Z-directions for the three-dimensional (3D) scanning stage of magnetic resonance force microscopy. The XYZ-microstage based on assembling technology consists of three separated parts, i.e., a comb-drive XY-microstage, two comb-drive Z-microstages and a bottom silicon base substrate. The separated parts are assembled together by using micro manipulators and a guide block of stainless steel. It is demonstrated that the assembled XYZ-microstage can achieve large displacements of 25.2 μm in X direction, 20.4 μm in Y direction and 58.5 μm in Z direction.

Original languageEnglish
Article number7050874
Pages (from-to)14-17
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2015-February
Issue numberFebruary
DOIs
Publication statusPublished - 2015 Feb 26
Event2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal
Duration: 2015 Jan 182015 Jan 22

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Assembled comb-drive XYZ-microstage with large displacements for low temperature measurement systems'. Together they form a unique fingerprint.

Cite this