Area-selected ion milling for reflection wavefront error correction of soft X-ray multilayer mirrors

Toshihide Tsuru, Yu Sakai, Tadashi Hatano, Masaki Yamamoto

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    3 Citations (Scopus)

    Abstract

    For accurate reflection wavefront error correction of imaging soft X-ray multilayer mirrors, a period-by-period ion milling system was developed. A stable and homogenized radial distribution of ion beam was realized for an ion milling over a whole area of 100 mm-wide multilayer. To demonstrate the wavefront error correction principle, a dielectric multilayer mirror for visible light was locally milled by our system. Wavefront as measured by a phase shifting interferometer showed the reflection phase of local milling multilayer advanced. Area-selected ion millings with mask templates made of Mo and Si, and by photoresist contact masks were carried out. Although striped patterns generated by the difference of spectroscopic reflectance between Mo and Si were observed at peripherals of milling area when templates were used, a clear and sharp edge pattern was obtained with contact mask. Soft X-ray reflectance of a Mo/Si multilayer milled with photoresist contact mask showed good feasibility of precise wavefront error correction of multilayers. These results proved our phase correction method is promising and practical for the 0.1 nm-period correction of soft X-ray multilayer mirror.

    Original languageEnglish
    Title of host publicationSRI 2009 - The 10th International Conference on Synchrotron Radiation Instrumentation
    Pages772-775
    Number of pages4
    DOIs
    Publication statusPublished - 2010 Aug 3
    Event10th International Conference on Synchrotron Radiation Instrumentation, SRI 2009 - Melbourne, VIC, Australia
    Duration: 2009 Sep 272009 Oct 2

    Publication series

    NameAIP Conference Proceedings
    Volume1234
    ISSN (Print)0094-243X
    ISSN (Electronic)1551-7616

    Other

    Other10th International Conference on Synchrotron Radiation Instrumentation, SRI 2009
    Country/TerritoryAustralia
    CityMelbourne, VIC
    Period09/9/2709/10/2

    Keywords

    • ion milling
    • multilayer
    • phase correction
    • soft X-ray

    ASJC Scopus subject areas

    • Physics and Astronomy(all)

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