Ar plasma irradiation effects in atomically controlled Si epitaxial growth

Daisuke Muto, Masao Sakuraba, Takuya Seino, Junichi Murota

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)

Fingerprint Dive into the research topics of 'Ar plasma irradiation effects in atomically controlled Si epitaxial growth'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy