Abstract
In electronic devices, magnetic disks and micromechanical sysems, thin films coated on substrates are widely used. In order to develop a method for evaluation of their fracture strengths by means of indentation by a small spherical indenter, it is necessary to study the stress distribution in a film subjected to such indentation. In this paper, an approximate expression for the elastic stress distribution is derived for the case where the film thickness is much smaller than the radius of the contact area. A finite-element analysis is also carried out to examine the accuracy of the approximate expression.
| Original language | English |
|---|---|
| Pages (from-to) | 416-420 |
| Number of pages | 5 |
| Journal | Transactions of the Japan Society of Mechanical Engineers Series A |
| Volume | 60 |
| Issue number | 570 |
| DOIs | |
| Publication status | Published - 1994 Jan 1 |
| Externally published | Yes |
Keywords
- Contact Problem
- Elasticity
- Film
- Finite-Element Method
- Indentation
- Numerical Analysis
- Spherical Indenter
- Stress Distribution
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering
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Cite this
Kagawa, H., Ichikawa, M., Takamatsu, T., & Kuwano, H. (1994). Approximate Expression for Stress Distribution in Film Subjected to Indentation by Spherical Indenter (The Case of a Very Thin Film). Transactions of the Japan Society of Mechanical Engineers Series A, 60(570), 416-420. https://doi.org/10.1299/kikaia.60.416