Approximate Expression for Stress Distribution in Film Subjected to Indentation by Spherical Indenter (The Case of a Very Thin Film)

Hiroyuki Kagawa; Masahiro Ichikawa; Tohru Takamatsu; Hiroki Kuwano

doi:10.1299/kikaia.60.416

Approximate Expression for Stress Distribution in Film Subjected to Indentation by Spherical Indenter (The Case of a Very Thin Film)

Hiroyuki Kagawa, Masahiro Ichikawa, Tohru Takamatsu, Hiroki Kuwano

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

In electronic devices, magnetic disks and micromechanical sysems, thin films coated on substrates are widely used. In order to develop a method for evaluation of their fracture strengths by means of indentation by a small spherical indenter, it is necessary to study the stress distribution in a film subjected to such indentation. In this paper, an approximate expression for the elastic stress distribution is derived for the case where the film thickness is much smaller than the radius of the contact area. A finite-element analysis is also carried out to examine the accuracy of the approximate expression.

Original language	English
Pages (from-to)	416-420
Number of pages	5
Journal	Transactions of the Japan Society of Mechanical Engineers Series A
Volume	60
Issue number	570
DOIs	https://doi.org/10.1299/kikaia.60.416
Publication status	Published - 1994
Externally published	Yes

Keywords

Contact Problem
Elasticity
Film
Finite-Element Method
Indentation
Numerical Analysis
Spherical Indenter
Stress Distribution

ASJC Scopus subject areas

Materials Science(all)
Mechanics of Materials
Mechanical Engineering

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Approximate Expression for Stress Distribution in Film Subjected to Indentation by Spherical Indenter (The Case of a Very Thin Film). / Kagawa, Hiroyuki; Ichikawa, Masahiro; Takamatsu, Tohru; Kuwano, Hiroki.

In: Transactions of the Japan Society of Mechanical Engineers Series A, Vol. 60, No. 570, 1994, p. 416-420.

Research output: Contribution to journal › Article › peer-review

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AU - Takamatsu, Tohru

AU - Kuwano, Hiroki

PY - 1994

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Approximate Expression for Stress Distribution in Film Subjected to Indentation by Spherical Indenter (The Case of a Very Thin Film)

Abstract

Keywords

ASJC Scopus subject areas

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