Applications of magnetic thin film to integrated EM field shielding and in-line noise suppression

Masahiro Yamaguchi, Ki Hycon Kim, Shinji Ikeda, Ken Ichi Arai, Yutaka Shimada, Nobuhiro Matsushita, Masanori Abe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

RF integrated thin-film EM field shielding and inline noise suppression have been demonstrated by using Co 85 Nb 12 Zr 3 amorphous film and electroplated Ni-Zn(-Co) ferrite films. The FMR loss generation at GHz frequency range is essential to realize this idea. The frequency range of loss generation can be adjusted to specific applications by materials selection and by the magnetic micro wiring technique. Insertion toss was only 0.7dB at 1GHz and reached 14 dB for a 17.2mm long coplanar transmission line with a 0.5-μm-thick Co 85 Nb 12 Zr 3 film provided the in-between gap was 7.5 μm.

Original languageEnglish
Title of host publicationIEEE International Symposium on Electromagnetic Compatibility
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages931-934
Number of pages4
ISBN (Electronic)0780377796
DOIs
Publication statusPublished - 2003 Jan 1
Event2003 IEEE International Symposium on Electromagnetic Compatibility, EMC 2003 - Istanbul, Turkey
Duration: 2003 May 112003 May 16

Publication series

NameIEEE International Symposium on Electromagnetic Compatibility
Volume2
ISSN (Print)1077-4076
ISSN (Electronic)2158-1118

Other

Other2003 IEEE International Symposium on Electromagnetic Compatibility, EMC 2003
CountryTurkey
CityIstanbul
Period03/5/1103/5/16

Keywords

  • Ferromagnetic resonance
  • Integrated in-line countermeasure
  • Integrated shield
  • Magnetic films
  • Permeability

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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