Applications of high density plasma to optical micromachines

Research output: Contribution to journalReview articlepeer-review

Original languageEnglish
Pages (from-to)980-983
Number of pages4
JournalSeimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering
Volume73
Issue number9
DOIs
Publication statusPublished - 2007
Externally publishedYes

Keywords

  • Deep reactive etching
  • Micromachine
  • Optical MEMS
  • Silicon

ASJC Scopus subject areas

  • Mechanical Engineering

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