Application oriented micro-nano electro mechanical systems

Masayoshi Esashi, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Micromachining is an extended IC fabrication based on photo-fabrication, deep etching, anodic bonding and other advanced process technologies. This is used to produce MEMS (Micro Electro Mechanical Systems) featuring multi-functions, small size and low cost. Nanostructures such as CNT (Carbon Nano Tube) can be also included in the MEMS by nanomachining. MEMS are used as value added key components in systems. Examples of application oriented MEMS developed with attention to packaging and circuit integration will be described below. Silicon rotational gyroscope has been developed for the purpose of motion control and navigation1). The principle and the photograph are shown in Fig.1. A 1.5 mm diameter silicon ring which is electrostatically levitated by digital control using capacitive position sensing and electrostatic actuation is rotated at 75,000 rpm. The rotation is based on the principle of a variable capacitance motor. A 5μm radial gap between the ring rotor and stator electrodes is formed using deep RIE (Reactive Ion Etching) of a silicon wafer. The silicon is anodically bonded on both sides to glasses which have electrodes. The chip is packaged in a vacuum cavity to prevent a viscous dumping. This inertia measurement system can measure two axes rotation and three axes acceleration simultaneously with high precision (sensitivity 0.01 deg/s and 0.2mG respectively).

Original languageEnglish
Title of host publicationDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages480-481
Number of pages2
DOIs
Publication statusPublished - 2007 Dec 1
Events20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan
Duration: 2007 Nov 52007 Nov 8

Publication series

NameDigest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Other

Others20th International Microprocesses and Nanotechnology Conference, MNC 2007
Country/TerritoryJapan
CityKyoto
Period07/11/507/11/8

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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