Application oriented micro-nano electro mechanical systems

Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Sophisticated MEMS device used as a two-axis rotating gyroscope for navigation control system was developed. A silicon ring rotor is electrostatically levitated and rotated at 12,000rpm based on the principle of a variable capacitance motor. MEMS relay which uses a thermal bimetal actuator for making contact to multi-springs was developed for LSI tester. The springs have electrical connections to the backside using electrical feedthrough in a glass, which results in high frequency response up to 20 GHz and in high reliability owing to the hermetic sealing. Multi-probe data storage was developed. Electrical recording on a conductive polymer film and a ferroelectric film were performed. Electron field emitter array for non-contact multi-probe data storage and multi-column electron beam lithography was developed using carbon nano tube emitter and electrostatic lens for focusing. Micro molding for harsh environment as glass mold press was also developed.

Original languageEnglish
Title of host publicationCollection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications
PublisherAmerican Institute of Aeronautics and Astronautics Inc.
Pages251-255
Number of pages5
ISBN (Print)1563477211, 9781563477218
DOIs
Publication statusPublished - 2004
EventCollection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications - Monterey, CA, United States
Duration: 2004 Nov 12004 Nov 5

Publication series

NameCollection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications

Other

OtherCollection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications
CountryUnited States
CityMonterey, CA
Period04/11/104/11/5

ASJC Scopus subject areas

  • Engineering(all)

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