TY - GEN
T1 - Application oriented micro-nano electro mechanical systems
AU - Esashi, Masayoshi
PY - 2004
Y1 - 2004
N2 - Sophisticated MEMS device used as a two-axis rotating gyroscope for navigation control system was developed. A silicon ring rotor is electrostatically levitated and rotated at 12,000rpm based on the principle of a variable capacitance motor. MEMS relay which uses a thermal bimetal actuator for making contact to multi-springs was developed for LSI tester. The springs have electrical connections to the backside using electrical feedthrough in a glass, which results in high frequency response up to 20 GHz and in high reliability owing to the hermetic sealing. Multi-probe data storage was developed. Electrical recording on a conductive polymer film and a ferroelectric film were performed. Electron field emitter array for non-contact multi-probe data storage and multi-column electron beam lithography was developed using carbon nano tube emitter and electrostatic lens for focusing. Micro molding for harsh environment as glass mold press was also developed.
AB - Sophisticated MEMS device used as a two-axis rotating gyroscope for navigation control system was developed. A silicon ring rotor is electrostatically levitated and rotated at 12,000rpm based on the principle of a variable capacitance motor. MEMS relay which uses a thermal bimetal actuator for making contact to multi-springs was developed for LSI tester. The springs have electrical connections to the backside using electrical feedthrough in a glass, which results in high frequency response up to 20 GHz and in high reliability owing to the hermetic sealing. Multi-probe data storage was developed. Electrical recording on a conductive polymer film and a ferroelectric film were performed. Electron field emitter array for non-contact multi-probe data storage and multi-column electron beam lithography was developed using carbon nano tube emitter and electrostatic lens for focusing. Micro molding for harsh environment as glass mold press was also developed.
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U2 - 10.2514/6.2004-6747
DO - 10.2514/6.2004-6747
M3 - Conference contribution
AN - SCOPUS:19944414653
SN - 1563477211
SN - 9781563477218
T3 - Collection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications
SP - 251
EP - 255
BT - Collection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications
PB - American Institute of Aeronautics and Astronautics Inc.
T2 - Collection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications
Y2 - 1 November 2004 through 5 November 2004
ER -