Sophisticated MEMS device used as a two-axis rotating gyroscope for navigation control system was developed. A silicon ring rotor is electrostatically levitated and rotated at 12,000rpm based on the principle of a variable capacitance motor. MEMS relay which uses a thermal bimetal actuator for making contact to multi-springs was developed for LSI tester. The springs have electrical connections to the backside using electrical feedthrough in a glass, which results in high frequency response up to 20 GHz and in high reliability owing to the hermetic sealing. Multi-probe data storage was developed. Electrical recording on a conductive polymer film and a ferroelectric film were performed. Electron field emitter array for non-contact multi-probe data storage and multi-column electron beam lithography was developed using carbon nano tube emitter and electrostatic lens for focusing. Micro molding for harsh environment as glass mold press was also developed.