Application of X-ray fluorescence holography to the analysis of the interior and surface of an yttrium oxide thin film

Jens R. Stellhorn, Shinya Hosokawa, Naohisa Happo, Hiroo Tajiri, Tomohiro Matsushita, Kenichi Kaminaga, Tomoteru Fukumura, Tetsuya Hasegawa, Koji Kimura, Kouichi Hayashi

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

We report on the characterization of a thin film of yttrium oxide by X-ray fluorescence holography. The sample has a layered structure with an YO base layer and an oxidized Y2O3 surface. Both layers are clearly observed in the atomic image reconstructions, and their local structure is analyzed. We show that by using incident energies close to the absorption edge of the fluorescing atom, it becomes possible to observe the thin surface layer clearly, even next to a base layer containing the same fluorescing element.

Original languageEnglish
Pages (from-to)70-73
Number of pages4
JournalSurface and Interface Analysis
Volume51
Issue number1
DOIs
Publication statusPublished - 2019 Jan

Keywords

  • X-ray fluorescence holography
  • thin-film analysis
  • yttrium oxide

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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