This paper discusses the application of thin-film inductors to thin-film based LC filters. The trial monolithic thin-film LC filter consists of thin-film inductors and thin-film capacitors, fabricated by the RF sputtering and ion-milling techniques. This filter is a second-order low-pass filter with a cut-off frequency of 50 MHz. We fabricated two kinds of filters using a non magnetic thin-film inductor or a magnetic thin-film inductor, and proved that magnetic thin-film permits to the reduction of the size and the insertion loss of the filter.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering