TY - JOUR
T1 - Application of modulation techniques to atomic emission spectrometry with inductively-coupled radio-frequency plasma and radio-frequency glow discharge plasma
AU - Wagatsuma, Kazuaki
N1 - Funding Information:
The author acknowledges financial supports by Grants from the Academic Society Division of The Iron and Steel Institute of Japan and by a Grant from KAWASAKI Steel 21 st. Century Foundation.
PY - 2002/5
Y1 - 2002/5
N2 - Three novel measuring systems for modulation technique to be applied to atomic emission spectrometry are reviewed. A plasma gas modulation technique is employed for an improvement in the detection sensitivity in inductively-coupled radio-frequency plasma atomic emission spectrometry (ICP-AES). Both an amplitude modulation technique and a bias current modulation technique are effective for obtaining better analytical performance in radio-frequency glow discharge optical emission spectrometry (GD-OES). These techniques produce cyclically-changing components in the emission signals by modulating the excitation processes occurring in each plasma. The detection with a lock-in amplifier plays an important role in these measuring systems; the modulated component of the emission intensities can be selectively detected whereas any noises are completely removed. Furthermore, the background levels are generally less effected by the plasma modulation. These benefit yield the emission signals having larger signal-to-noise ratios as well as larger signal-to-background ratios and therefore the analytical results with better precision and sensitivity.
AB - Three novel measuring systems for modulation technique to be applied to atomic emission spectrometry are reviewed. A plasma gas modulation technique is employed for an improvement in the detection sensitivity in inductively-coupled radio-frequency plasma atomic emission spectrometry (ICP-AES). Both an amplitude modulation technique and a bias current modulation technique are effective for obtaining better analytical performance in radio-frequency glow discharge optical emission spectrometry (GD-OES). These techniques produce cyclically-changing components in the emission signals by modulating the excitation processes occurring in each plasma. The detection with a lock-in amplifier plays an important role in these measuring systems; the modulated component of the emission intensities can be selectively detected whereas any noises are completely removed. Furthermore, the background levels are generally less effected by the plasma modulation. These benefit yield the emission signals having larger signal-to-noise ratios as well as larger signal-to-background ratios and therefore the analytical results with better precision and sensitivity.
KW - Atomic emission spectrometry
KW - Depth profiling
KW - Detection limit
KW - Glow discharge plasma
KW - Inductively-coupled plasma
KW - Modulation technique
KW - Signal-to-background ratio
KW - Signal-to-noise ratio
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U2 - 10.1081/ASR-120006045
DO - 10.1081/ASR-120006045
M3 - Article
AN - SCOPUS:0036563381
VL - 37
SP - 223
EP - 245
JO - Applied Spectroscopy Reviews
JF - Applied Spectroscopy Reviews
SN - 0570-4928
IS - 2
ER -