Application of high aspect ratio scanning probe in microstructure measurement

M. M. Fu, K. K. Guo, Yuanliu Chen, Y. H. Yang, B. F. Ju

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

An experiment, which is based on a self-developed pure tungsten high aspect ratio scanning probe, was conducted to measure the topography of a micro channel and a complex microstructure respectively. Comparison and analysis of both results by the tungsten probe and a single-crystal diamond probe were carried out. It indicates that the newly developed pure tungsten scanning probe has the capability in topography measurement, particularly fit for the high aspect ratio surface measurement.

Original languageEnglish
Title of host publication8th CHINA-JAPAN International Conference on Ultra-Precision Machining, CJICUPM2008
Pages123-127
Number of pages5
DOIs
Publication statusPublished - 2009 Nov 4
EventCHINA-JAPAN International Conference on Ultra-Precision Machining, CJICUPM2008 - Changsha, China
Duration: 2008 Nov 242008 Nov 25

Publication series

NameAdvanced Materials Research
Volume69-70
ISSN (Print)1022-6680

Other

OtherCHINA-JAPAN International Conference on Ultra-Precision Machining, CJICUPM2008
CountryChina
CityChangsha
Period08/11/2408/11/25

Keywords

  • High aspect ratio scanning probe
  • High aspect ratio topography
  • Microstructure
  • Ultra-precision metrology

ASJC Scopus subject areas

  • Engineering(all)

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