Application of fluorinated amorphous carbon thin films for low dielectric constant interlayer dielectrics

Kazuhiko Endo, Toru Tatsumi, Yoshihisa Matsubara, Tadahiko Horiuchi

Research output: Contribution to journalArticle

34 Citations (Scopus)

Abstract

Fluorinated amorphous carbon thin films (a-C:F) for use as low-dielectric-constant interlayer dielectrics are deposited by helicon-wave plasma-enhanced chemical vapor deposition using fluorocarbon compounds as a source material. The a-C:F films can be grown from C4F8 at a high deposition rate (above 400 nm/min) and they are thermally stable up to 350 °C. The addition of bias power to the substrate makes it possible to completely fill gaps in the wiring (space 0.35 μm, height 0.65 μm) with the a-C:F film. To protect the a-C:F film during further processing, a SiO2 film is deposited to add mechanical strength and resistance to the oxygen plasma used to remove resist materials. The adhesion between the a-C:F and SiO2 films is dramatically improved by inserting an adhesion promoter consisting of a-C:H and Si-rich SiO2. By using the a-C:F and SiO2 dielectrics and chemical mechanical polishing (CMP) process, globally planarized 3-level metallization is achieved. The a-C:F dielectric can reduce inter-line capacitance close to a half value as compared with the conventional SiO2 dielectrics.

Original languageEnglish
Pages (from-to)1809-1814
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume37
Issue number4 SUPPL. A
DOIs
Publication statusPublished - 1998 Apr

Keywords

  • Amorphous
  • Carbon
  • Dielectric constant
  • Fluorine
  • Interlayer dielectrics
  • Plasma enhanced CVD

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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