Application of FIB with micro pick-up to microstructural study of irradiated SiC/SiC composites

Kazumi Ozawa, Sosuke Kondo, Hirotatsu Kishimoto, Akira Kohyama

Research output: Contribution to journalReview articlepeer-review

2 Citations (Scopus)

Abstract

The combination of focused ion beam (FIB) micro-processing and the lift-out technique using the micro pick-up system was applied to the preparation of TEM specimens of irradiated SiC/SiC composites. The deformation caused by microstructural evolution was observed in the pyrolitic carbon interphase, and several helium bubbles and cavities were detected in the CVI matrix.

Original languageEnglish
Pages (from-to)519-521
Number of pages3
JournalJournal of Electron Microscopy
Volume53
Issue number5
DOIs
Publication statusPublished - 2004
Externally publishedYes

Keywords

  • FIB
  • Irradiation effect
  • Micro pick-up system
  • Microstructural evolution
  • SiC/SiC composite
  • Swelling

ASJC Scopus subject areas

  • Instrumentation

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