Application of Bi-directional thin-film micro wire array to RF integrated spiral inductors

Masahiro Yamaguchi, K. Suezawa, M. Baba, K. I. Arai, Y. Shimada, S. Tanabe, K. Itoh

Research output: Contribution to journalConference articlepeer-review

32 Citations (Scopus)

Abstract

Vertically and horizontally aligned micro wire arrays with the magnetic hard axis perpendicular to the length of the wire are micro-fabricated from zero-magnetostrictive CoNbZr film. Annealing produced a 180-degree domain pattern, small coercive force and good permeability. Using the micro wire array with line/space = 9 μm/2 μm, an RF integrated inductor exhibited L = 7.5 nH(+11% of air core's), R = 7.6 Ω and Q = 6.3 (almost same as the air core's).

Original languageEnglish
Pages (from-to)3514-3517
Number of pages4
JournalIEEE Transactions on Magnetics
Volume36
Issue number5 I
DOIs
Publication statusPublished - 2000 Sep 1
Event2000 International Magnetics Conference (INTERMAG 2000) - Toronto, Ont, Canada
Duration: 2000 Apr 92000 Apr 12

Keywords

  • Bi-directional micro wire array
  • Complex permeability
  • Domain pattern
  • Hysteresis curve
  • Inductance
  • Microfabrication
  • Quality factor
  • RF integrated inductor

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)

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