Application of a bias-current modulation technique to radiofrequency glow discharge optical emission spectrometry

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Abstract

A 13.56-MHz Grimm-style glow discharge plasma in which pulsated bias currents are introduced was investigated concerning the analytical applications. The d.c. bias currents driven by a self-bias potential are conducted through the r.f. plasma body by using a low-pass filter circuit and a variable resistor. Excitation by a modified r.f. plasma can yield larger emission intensities. By modulating the bias current associated with phase- sensitive detection, the emission intensities can be measured at very low noise levels, enabling the detection limit to be improved more. A detection limit of 3 x 10 -4 mass % was obtained for Mn determination in Fe-based binary alloy samples, whereas 1.4 x 10 -2 mass % Mn was obtained in the conventional excitation of an 80-W r.f. discharge plasma.

Original languageEnglish
Pages (from-to)517-523
Number of pages7
Journalanalytical sciences
Volume15
Issue number6
DOIs
Publication statusPublished - 1999 Jun

Keywords

  • Conduction of the bias current
  • Current modulation
  • Detection limit
  • Fe-based alloys
  • Radio-frequency Grimm glow discharge plasma
  • Self-bias potential

ASJC Scopus subject areas

  • Analytical Chemistry

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