Abstract
This paper reports on the application of Rutherford Backscattering Spectrometry (RBS) and Elastic Recoil Detection Analysis (ERDA) using the microbeam system at Tohoku University. The first microbeam RBS/ERDA spectra in this beam line were successfully obtained for microstructured semiconductor devices. The results indicate a clear difference in stoichiometry and thickness after annealing. In addition, a comparison with Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) analysis is presented.
Original language | English |
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Pages (from-to) | 23-28 |
Number of pages | 6 |
Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
Volume | 492 |
DOIs | |
Publication status | Published - 2021 Apr 1 |
Keywords
- ERDA
- Hydrogen
- Microbeam
- RBS
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Instrumentation