Application of μRBS/ERDA system in microstructured devices

M. Saito, Y. Hayashi, S. Kosaka, J. Yahiro, M. Miwa, S. Toyama, S. Matsuyama

Research output: Contribution to journalArticlepeer-review


This paper reports on the application of Rutherford Backscattering Spectrometry (RBS) and Elastic Recoil Detection Analysis (ERDA) using the microbeam system at Tohoku University. The first microbeam RBS/ERDA spectra in this beam line were successfully obtained for microstructured semiconductor devices. The results indicate a clear difference in stoichiometry and thickness after annealing. In addition, a comparison with Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) analysis is presented.

Original languageEnglish
Pages (from-to)23-28
Number of pages6
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Publication statusPublished - 2021 Apr 1


  • ERDA
  • Hydrogen
  • Microbeam
  • RBS

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation


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