Application of μRBS/ERDA system in microstructured devices

M. Saito; Y. Hayashi; S. Kosaka; J. Yahiro; M. Miwa; S. Toyama; S. Matsuyama

doi:10.1016/j.nimb.2021.01.017

Application of μRBS/ERDA system in microstructured devices

M. Saito, Y. Hayashi, S. Kosaka, J. Yahiro, M. Miwa, S. Toyama, S. Matsuyama

ENG - Quantum Science and Energy Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

This paper reports on the application of Rutherford Backscattering Spectrometry (RBS) and Elastic Recoil Detection Analysis (ERDA) using the microbeam system at Tohoku University. The first microbeam RBS/ERDA spectra in this beam line were successfully obtained for microstructured semiconductor devices. The results indicate a clear difference in stoichiometry and thickness after annealing. In addition, a comparison with Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) analysis is presented.

Original language	English
Pages (from-to)	23-28
Number of pages	6
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	492
DOIs	https://doi.org/10.1016/j.nimb.2021.01.017
Publication status	Published - 2021 Apr 1

Keywords

ERDA
Hydrogen
Microbeam
RBS

ASJC Scopus subject areas

Nuclear and High Energy Physics
Instrumentation

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10.1016/j.nimb.2021.01.017

Cite this

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title = "Application of μRBS/ERDA system in microstructured devices",

abstract = "This paper reports on the application of Rutherford Backscattering Spectrometry (RBS) and Elastic Recoil Detection Analysis (ERDA) using the microbeam system at Tohoku University. The first microbeam RBS/ERDA spectra in this beam line were successfully obtained for microstructured semiconductor devices. The results indicate a clear difference in stoichiometry and thickness after annealing. In addition, a comparison with Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) analysis is presented.",

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author = "M. Saito and Y. Hayashi and S. Kosaka and J. Yahiro and M. Miwa and S. Toyama and S. Matsuyama",

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T1 - Application of μRBS/ERDA system in microstructured devices

AU - Saito, M.

AU - Hayashi, Y.

AU - Kosaka, S.

AU - Yahiro, J.

AU - Miwa, M.

AU - Toyama, S.

AU - Matsuyama, S.

PY - 2021/4/1

Y1 - 2021/4/1

N2 - This paper reports on the application of Rutherford Backscattering Spectrometry (RBS) and Elastic Recoil Detection Analysis (ERDA) using the microbeam system at Tohoku University. The first microbeam RBS/ERDA spectra in this beam line were successfully obtained for microstructured semiconductor devices. The results indicate a clear difference in stoichiometry and thickness after annealing. In addition, a comparison with Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) analysis is presented.

AB - This paper reports on the application of Rutherford Backscattering Spectrometry (RBS) and Elastic Recoil Detection Analysis (ERDA) using the microbeam system at Tohoku University. The first microbeam RBS/ERDA spectra in this beam line were successfully obtained for microstructured semiconductor devices. The results indicate a clear difference in stoichiometry and thickness after annealing. In addition, a comparison with Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) analysis is presented.

KW - ERDA

KW - Hydrogen

KW - Microbeam

KW - RBS

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DO - 10.1016/j.nimb.2021.01.017

M3 - Article

AN - SCOPUS:85101028981

VL - 492

SP - 23

EP - 28

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

ER -

Application of μRBS/ERDA system in microstructured devices

Abstract

Keywords

ASJC Scopus subject areas

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