Apfim studies of compositional inhomogeneity in sputtered Co-Cr thin films

K. Hono, Y. Maeda, J. L. Li, T. Sakurai

    Research output: Contribution to journalArticlepeer-review

    17 Citations (Scopus)


    Atom probe analysis results of Co-22at%Cr bulk alloy and its thin films are presented. While no compositional inhomogeneity is detected from the bulk sample, a significant compositional fluctuation is present in the thin film specimen which is sputter deposited on a heated substrate. The concentration of the Cr enriched region is in the range of 30 - 40 at.%Cr, while that of the Cr depleted region is approximately 5 at.%Cr. Such compositional fluctuations are present within a grain. These results are in agreement with NMR and TEM results.

    Original languageEnglish
    Pages (from-to)3745-3747
    Number of pages3
    JournalIEEE Transactions on Magnetics
    Issue number6
    Publication statusPublished - 1993 Nov

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Electrical and Electronic Engineering


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