Antisymmetric-mode lamb wave methanol sensor with edge reflectors for fuel cell applications

Ryunosuke Hino, Masayoshi Esashi, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Citations (Scopus)

Abstract

A Lamb wave sensor to measure the concentration of methanol solution in direct methanol fuel cell (DMFC) systems was designed, fabricated and evaluated. The sensor piezoelectrically generates the lowest antisymmetric mode (A0-mode) Lamb wave on a suspended thin AlN/SiO2/Si composite membrane, and confines a standing wave with edge reflectors. The fabricated sensor showed an almost constant sensitivity of 510 ppm/% in methanol concentration from 0 % to 100 %. The temperature coefficient of frequency (TCF) was found to be -31 ppm/K, which might approach zero by using a 1 μm thick buried oxide (BOX) layer.

Original languageEnglish
Title of host publicationMEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages871-874
Number of pages4
DOIs
Publication statusPublished - 2010 Jun 1
Event23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China
Duration: 2010 Jan 242010 Jan 28

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
CountryChina
CityHong Kong
Period10/1/2410/1/28

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Hino, R., Esashi, M., & Tanaka, S. (2010). Antisymmetric-mode lamb wave methanol sensor with edge reflectors for fuel cell applications. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest (pp. 871-874). [5442345] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2010.5442345