Anti-Corrosive and Anti-Catalytic Cr2O3 Treated Gas Tubing System

Y. Shirai; S. Miyoshi; T. Kojima; T. Ohmi

doi:10.1109/ISSM.1994.729461

Anti-Corrosive and Anti-Catalytic Cr2O3 Treated Gas Tubing System

Y. Shirai, S. Miyoshi, T. Kojima, T. Ohmi

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Conference article › peer-review

2 Citations (Scopus)

Abstract

We have developed a complete chromium oxide (Cr2O3) passivation technology on the SUS316L stainless steel surfaces for use in high purity gas distribution systems and process chambers. Cr2O3 passivated surface has a great characteristic of anti-corrosion and reduces the amount of adsorbed moisture and is very excellent for the dry down property. This surface also has good chemical stability for very active specialty gases such as SiH4. Furthermore we have succeeded in forming a complete Cr2O3 passivated film on the electropolished (EP) surface of ferritic stainless steel.

Original language	English
Article number	729461
Pages (from-to)	217-218
Number of pages	2
Journal	IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings
DOIs	https://doi.org/10.1109/ISSM.1994.729461
Publication status	Published - 1994
Event	1994 International Symposium on Semiconductor Manufacturing, ISSM 1994 - Tokyo, Japan Duration: 1994 Jun 21 → 1994 Jun 22

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Engineering(all)
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

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10.1109/ISSM.1994.729461

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title = "Anti-Corrosive and Anti-Catalytic Cr2O3 Treated Gas Tubing System",

abstract = "We have developed a complete chromium oxide (Cr2O3) passivation technology on the SUS316L stainless steel surfaces for use in high purity gas distribution systems and process chambers. Cr2O3 passivated surface has a great characteristic of anti-corrosion and reduces the amount of adsorbed moisture and is very excellent for the dry down property. This surface also has good chemical stability for very active specialty gases such as SiH4. Furthermore we have succeeded in forming a complete Cr2O3 passivated film on the electropolished (EP) surface of ferritic stainless steel.",

author = "Y. Shirai and S. Miyoshi and T. Kojima and T. Ohmi",

note = "Publisher Copyright: {\textcopyright} 1994 IEEE.; 1994 International Symposium on Semiconductor Manufacturing, ISSM 1994 ; Conference date: 21-06-1994 Through 22-06-1994",

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doi = "10.1109/ISSM.1994.729461",

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pages = "217--218",

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T1 - Anti-Corrosive and Anti-Catalytic Cr2O3 Treated Gas Tubing System

AU - Shirai, Y.

AU - Miyoshi, S.

AU - Kojima, T.

AU - Ohmi, T.

PY - 1994

Y1 - 1994

N2 - We have developed a complete chromium oxide (Cr2O3) passivation technology on the SUS316L stainless steel surfaces for use in high purity gas distribution systems and process chambers. Cr2O3 passivated surface has a great characteristic of anti-corrosion and reduces the amount of adsorbed moisture and is very excellent for the dry down property. This surface also has good chemical stability for very active specialty gases such as SiH4. Furthermore we have succeeded in forming a complete Cr2O3 passivated film on the electropolished (EP) surface of ferritic stainless steel.

AB - We have developed a complete chromium oxide (Cr2O3) passivation technology on the SUS316L stainless steel surfaces for use in high purity gas distribution systems and process chambers. Cr2O3 passivated surface has a great characteristic of anti-corrosion and reduces the amount of adsorbed moisture and is very excellent for the dry down property. This surface also has good chemical stability for very active specialty gases such as SiH4. Furthermore we have succeeded in forming a complete Cr2O3 passivated film on the electropolished (EP) surface of ferritic stainless steel.

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DO - 10.1109/ISSM.1994.729461

M3 - Conference article

AN - SCOPUS:11744388849

SN - 1523-553X

SP - 217

EP - 218

JO - ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings

JF - ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings

M1 - 729461

T2 - 1994 International Symposium on Semiconductor Manufacturing, ISSM 1994

Y2 - 21 June 1994 through 22 June 1994

ER -

Anti-Corrosive and Anti-Catalytic Cr2O3 Treated Gas Tubing System

Abstract

ASJC Scopus subject areas

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