Anti-Corrosive and Anti-Catalytic Cr2O3 Treated Gas Tubing System

Y. Shirai, S. Miyoshi, T. Kojima, T. Ohmi

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)

Abstract

We have developed a complete chromium oxide (Cr2O3) passivation technology on the SUS316L stainless steel surfaces for use in high purity gas distribution systems and process chambers. Cr2O3 passivated surface has a great characteristic of anti-corrosion and reduces the amount of adsorbed moisture and is very excellent for the dry down property. This surface also has good chemical stability for very active specialty gases such as SiH4. Furthermore we have succeeded in forming a complete Cr2O3 passivated film on the electropolished (EP) surface of ferritic stainless steel.

Original languageEnglish
Article number729461
Pages (from-to)217-218
Number of pages2
JournalIEEE International Symposium on Semiconductor Manufacturing Conference Proceedings
DOIs
Publication statusPublished - 1994 Jan 1
Event1994 International Symposium on Semiconductor Manufacturing, ISSM 1994 - Tokyo, Japan
Duration: 1994 Jun 211994 Jun 22

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Engineering(all)
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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