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Annealing of an AlN buffer layer in N2-CO for growth of a high-quality AlN film on sapphire
Hideto Miyake, Gou Nishio, Shuhei Suzuki, Kazumasa Hiramatsu, Hiroyuki Fukuyama, Jesbains Kaur, Noriyuki Kuwano
Research output: Contribution to journal › Article › peer-review
153
Citations
(Scopus)