Annealing of an AlN buffer layer in N2-CO for growth of a high-quality AlN film on sapphire

Hideto Miyake, Gou Nishio, Shuhei Suzuki, Kazumasa Hiramatsu, Hiroyuki Fukuyama, Jesbains Kaur, Noriyuki Kuwano

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153 Citations (Scopus)

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