TY - JOUR
T1 - Annealing effect on the chemical structure of diamondlike carbon
AU - Takabayashi, Susumu
AU - Okamoto, Keishi
AU - Sakaue, Hiroyuki
AU - Takahagi, Takayuki
AU - Shimada, Kenya
AU - Nakatani, Tatsuyuki
N1 - Funding Information:
The authors gratefully acknowledge Mr. Yuichi Miura, Dr. Mitsuharu Higashiguchi, and Dr. Naohisa Tobita of the Department of Physical Science, Graduate School of Science, Hiroshima University for supporting the synchrotron radiation experiments at HiSOR BL-1, and Dr. Daisuke Kajiya for supporting the micro-Raman spectroscopy experiments at Natural Science Center for Basic Research and Development (N-BARD), Hiroshima University. The synchrotron radiation experiments have been performed under the approval of HSRC (Proposal No. 07-A-03).
PY - 2008
Y1 - 2008
N2 - The effect of annealing in an ultrahigh vacuum on the chemical structure of diamondlike carbon (DLC) was investigated using photoelectron spectroscopy, thermal desorption spectroscopy, electrical resistivity, and micro-Raman spectroscopy measurements. The line shapes of the C 1s photoelectron spectra depended on annealing temperature. The relative intensities of four chemical components in the spectra were quantitatively evaluated: s p3 carbon with carbon-carbon bonds (C-C s p3 carbon), s p2 carbon with carbon-carbon bonds (C-C s p2 carbon), s p2 carbon with hydrogen-carbon bonds (H-C s p2 carbon), and s p3 carbon with hydrogen-carbon bonds (H-C s p3 carbon). The variation of the ratio of the components demonstrated that hydrogen in DLC is emitted to the outside in between 450 and 600 °C, and the remaining DLC is graphized above 600 °C. The increase in the asymmetry of the C 1s spectra and the decrease in the electrical resistivity of the DLC film with annealing temperature agree with the picture that the H-C bonds in DLC produces large free spaces in the structure, which inhibit conductive routes and lead to high electrical resistivity.
AB - The effect of annealing in an ultrahigh vacuum on the chemical structure of diamondlike carbon (DLC) was investigated using photoelectron spectroscopy, thermal desorption spectroscopy, electrical resistivity, and micro-Raman spectroscopy measurements. The line shapes of the C 1s photoelectron spectra depended on annealing temperature. The relative intensities of four chemical components in the spectra were quantitatively evaluated: s p3 carbon with carbon-carbon bonds (C-C s p3 carbon), s p2 carbon with carbon-carbon bonds (C-C s p2 carbon), s p2 carbon with hydrogen-carbon bonds (H-C s p2 carbon), and s p3 carbon with hydrogen-carbon bonds (H-C s p3 carbon). The variation of the ratio of the components demonstrated that hydrogen in DLC is emitted to the outside in between 450 and 600 °C, and the remaining DLC is graphized above 600 °C. The increase in the asymmetry of the C 1s spectra and the decrease in the electrical resistivity of the DLC film with annealing temperature agree with the picture that the H-C bonds in DLC produces large free spaces in the structure, which inhibit conductive routes and lead to high electrical resistivity.
UR - http://www.scopus.com/inward/record.url?scp=50849138855&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=50849138855&partnerID=8YFLogxK
U2 - 10.1063/1.2969792
DO - 10.1063/1.2969792
M3 - Article
AN - SCOPUS:50849138855
VL - 104
JO - Journal of Applied Physics
JF - Journal of Applied Physics
SN - 0021-8979
IS - 4
M1 - 043512
ER -