Anisotropy control of magnetostrictive film patterns

Kouki Imamura, Kwang Ho Shin, Kazushi Ishiyama, Mitsuteru Inoue, Ken Ichi Arai

Research output: Contribution to journalConference articlepeer-review

6 Citations (Scopus)

Abstract

The magnetic properties of Fe-based amorphous films are thought to be highly sensitive to strain due to the large saturation magnetostriction and soft magnetic properties exhibited by the films. This is why patterned FeCoSiB films exhibit a large variation in their high-frequency impedance when strain is applied. To increase the sensitivity of strain sensors, it is very important to control the magnitude of magnetic anisotropy. We propose a method to control the magnetic anisotropy by stress bias annealing. By applying stress during annealing, we were able to control the anisotropy along the width of the patterned film. A strain sensor using a transverse-anisotropy-induced film pattern exhibited a figure of merit F ≈ 8300, while a sensor without anisotropy exhibited the F only 500.

Original languageEnglish
Pages (from-to)2025-2027
Number of pages3
JournalIEEE Transactions on Magnetics
Volume37
Issue number4 I
DOIs
Publication statusPublished - 2001 Jul 1
Event8th Joint Magnetism and Magnetic Materials -International Magnetic Conference- (MMM-Intermag) - San Antonio, TX, United States
Duration: 2001 Jan 72001 Jan 11

Keywords

  • Anisotropy control
  • High-frequency impedance
  • Magnetostrictive film
  • Strain sensitivity

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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