Anion-exchange separation of zirconium from hafnium using a multi-column method

Masahito Uchikoshi, Koji Mimura, Minoru Isshiki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

HfO 2 is expected to be a gate dielectric used in ULSI alternatives to SiO 2. Although the materials used in ULSI are required to be significantly pure, commercial Hf contains > 2 mass% Zr. It is important to establish a process for removing Zr from Hf. In the present study, anion-exchange separation using a multi-column method was employed. The separation tests were carried out at variety of temperatures and flow rates. The decrease in the flow rate of the mobile phase made the elution curves of both Hf(IV) and Zr(IV) broaden contrary to the case of Co(II), Cu(II), or Fe(III). This is caused by the difference in adsorption rate on the anion-exchange resin. In addition, more than one column was connected in series in order to enhance the separation. As a result, the content of Zr(IV) was successfully reduced to 1/100 of that relative to the raw material.

Original languageEnglish
Title of host publicationT.T. Chen Honorary Symposium on Hydrometallurgy, Electrometallurgy and Materials Characterization - Held During the TMS 2012 Annual Meeting and Exhibition
Pages303-314
Number of pages12
Publication statusPublished - 2012 May 14
EventT.T. Chen Honorary Symposium on Hydrometallurgy, Electrometallurgy and Materials Characterization - TMS 2012 Annual Meeting and Exhibition - Orlando, FL, United States
Duration: 2012 Mar 112012 Mar 15

Publication series

NameTMS Annual Meeting

Other

OtherT.T. Chen Honorary Symposium on Hydrometallurgy, Electrometallurgy and Materials Characterization - TMS 2012 Annual Meeting and Exhibition
CountryUnited States
CityOrlando, FL
Period12/3/1112/3/15

Keywords

  • Anion-exchange separation
  • Distribution coefficient
  • High purity Hf
  • Multi-column
  • Separation factor

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanics of Materials
  • Metals and Alloys

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    Uchikoshi, M., Mimura, K., & Isshiki, M. (2012). Anion-exchange separation of zirconium from hafnium using a multi-column method. In T.T. Chen Honorary Symposium on Hydrometallurgy, Electrometallurgy and Materials Characterization - Held During the TMS 2012 Annual Meeting and Exhibition (pp. 303-314). (TMS Annual Meeting).