Angle-resolved XPS study on chemical bonds in ultrathin silicon oxynitride films

S. Shinagawa, H. Nohira, T. Ikuta, M. Hori, M. Kase, T. Hattori

    Research output: Contribution to journalConference articlepeer-review

    23 Citations (Scopus)

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    Engineering & Materials Science

    Physics & Astronomy

    Chemical Compounds