TY - GEN
T1 - Angle-resolved photoelectron spectroscopy study on gate insulators
AU - Hattori, T.
AU - Kakushima, K.
AU - Nakajima, K.
AU - Nohira, H.
AU - Kimura, K.
AU - Iwai, H.
PY - 2006
Y1 - 2006
N2 - As a typical example of angle-resolved photoelectron spectroscopy studies, our detailed study on the composition and the chemical structure of oxynitride films was reviewed. The structure of oxynitride/Si interface was determined from the nearest neighbors of a nitrogen atom and those of a silicon atom detected by X-ray photoelectron spectroscopy. The roughness of interface measured by non-contact mode AFM was found to increase if the amount of nitrogen atoms at the interface exceeds a threshold value of 0.37 monolayers. This increase in interface roughness above this threshold can be attributed to the incorporation of nitrogen atoms in the silicon oxide layer next to the interface. Copyright The Electrochemical Society.
AB - As a typical example of angle-resolved photoelectron spectroscopy studies, our detailed study on the composition and the chemical structure of oxynitride films was reviewed. The structure of oxynitride/Si interface was determined from the nearest neighbors of a nitrogen atom and those of a silicon atom detected by X-ray photoelectron spectroscopy. The roughness of interface measured by non-contact mode AFM was found to increase if the amount of nitrogen atoms at the interface exceeds a threshold value of 0.37 monolayers. This increase in interface roughness above this threshold can be attributed to the incorporation of nitrogen atoms in the silicon oxide layer next to the interface. Copyright The Electrochemical Society.
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M3 - Conference contribution
AN - SCOPUS:33745443559
SN - 1566774381
SN - 9781566774383
T3 - ECS Transactions
SP - 275
EP - 286
BT - Dielectrics for Nanosystems II
T2 - 2nd International Symposium on Dielectrics for Nanosystems: Materials Science, Processing, Reliability, and Manufacturing - 209th Meeting of the Electrochemical Society
Y2 - 7 May 2006 through 12 May 2006
ER -