Angle-dependent total electron yield spectra in multilayer films for standing wave measurements

Takeo Ejima, Yasuji Muramatsu, Hisataka Takenaka

    Research output: Contribution to journalConference articlepeer-review

    Abstract

    By analyzing angle-dependent TEY spectra measured with fluorescence spectra, the depth-dependence of the absorbed energy in a Ru/B4C reflection multilayer film was obtained as follows. The periodic multilayer structure was obtained as [Ru 24.38Å/B4C 36.57Å] and [Ru 24.06Å/B4C 36.09Å] by GIXRD and reflectance measurements respectively. The angles of incidence of the fluorescence spectra were determined as 16° and 41° using the angle dependent TEY spectra measured with the fluorescence spectra. The depth-dependence of the absorbed energy, which represents the intensity of the fluorescence spectrum, was calculated using these parameters. These results suggest that an angle-dependent TEY measurement can be used as an easy phase-determination method for standing waves that are generated by a reflection multilayer.

    Original languageEnglish
    Article number17
    Pages (from-to)138-143
    Number of pages6
    JournalProceedings of SPIE - The International Society for Optical Engineering
    Volume5538
    DOIs
    Publication statusPublished - 2004 Dec 1
    EventOptical Constants of Materials for UV to X-Ray Wavelengths - Denver, CO, United States
    Duration: 2004 Aug 42004 Aug 5

    Keywords

    • Angle-dependence
    • Fluorescence
    • Interface
    • Multilayer
    • Standing wave
    • TEY
    • Total electron yield

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Computer Science Applications
    • Applied Mathematics
    • Electrical and Electronic Engineering

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