Abstract
By analyzing angle-dependent TEY spectra measured with fluorescence spectra, the depth-dependence of the absorbed energy in a Ru/B4C reflection multilayer film was obtained as follows. The periodic multilayer structure was obtained as [Ru 24.38Å/B4C 36.57Å] and [Ru 24.06Å/B4C 36.09Å] by GIXRD and reflectance measurements respectively. The angles of incidence of the fluorescence spectra were determined as 16° and 41° using the angle dependent TEY spectra measured with the fluorescence spectra. The depth-dependence of the absorbed energy, which represents the intensity of the fluorescence spectrum, was calculated using these parameters. These results suggest that an angle-dependent TEY measurement can be used as an easy phase-determination method for standing waves that are generated by a reflection multilayer.
| Original language | English |
|---|---|
| Article number | 17 |
| Pages (from-to) | 138-143 |
| Number of pages | 6 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5538 |
| DOIs | |
| Publication status | Published - 2004 Dec 1 |
| Event | Optical Constants of Materials for UV to X-Ray Wavelengths - Denver, CO, United States Duration: 2004 Aug 4 → 2004 Aug 5 |
Keywords
- Angle-dependence
- Fluorescence
- Interface
- Multilayer
- Standing wave
- TEY
- Total electron yield
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering