Angle-dependent total electron yield spectra in multilayer films for standing wave measurements

Takeo Ejima; Yasuji Muramatsu; Hisataka Takenaka

doi:10.1117/12.561199

Angle-dependent total electron yield spectra in multilayer films for standing wave measurements

Takeo Ejima, Yasuji Muramatsu, Hisataka Takenaka

Research output: Contribution to journal › Conference article › peer-review

Abstract

By analyzing angle-dependent TEY spectra measured with fluorescence spectra, the depth-dependence of the absorbed energy in a Ru/B₄C reflection multilayer film was obtained as follows. The periodic multilayer structure was obtained as [Ru 24.38Å/B₄C 36.57Å] and [Ru 24.06Å/B₄C 36.09Å] by GIXRD and reflectance measurements respectively. The angles of incidence of the fluorescence spectra were determined as 16° and 41° using the angle dependent TEY spectra measured with the fluorescence spectra. The depth-dependence of the absorbed energy, which represents the intensity of the fluorescence spectrum, was calculated using these parameters. These results suggest that an angle-dependent TEY measurement can be used as an easy phase-determination method for standing waves that are generated by a reflection multilayer.

Original language	English
Article number	17
Pages (from-to)	138-143
Number of pages	6
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5538
DOIs	https://doi.org/10.1117/12.561199
Publication status	Published - 2004 Dec 1
Event	Optical Constants of Materials for UV to X-Ray Wavelengths - Denver, CO, United States Duration: 2004 Aug 4 → 2004 Aug 5

Keywords

Angle-dependence
Fluorescence
Interface
Multilayer
Standing wave
TEY
Total electron yield

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.561199

Cite this

@article{34035d7b3cdb457c905bbf26fecd9af4,

title = "Angle-dependent total electron yield spectra in multilayer films for standing wave measurements",

abstract = "By analyzing angle-dependent TEY spectra measured with fluorescence spectra, the depth-dependence of the absorbed energy in a Ru/B4C reflection multilayer film was obtained as follows. The periodic multilayer structure was obtained as [Ru 24.38{\AA}/B4C 36.57{\AA}] and [Ru 24.06{\AA}/B4C 36.09{\AA}] by GIXRD and reflectance measurements respectively. The angles of incidence of the fluorescence spectra were determined as 16° and 41° using the angle dependent TEY spectra measured with the fluorescence spectra. The depth-dependence of the absorbed energy, which represents the intensity of the fluorescence spectrum, was calculated using these parameters. These results suggest that an angle-dependent TEY measurement can be used as an easy phase-determination method for standing waves that are generated by a reflection multilayer.",

keywords = "Angle-dependence, Fluorescence, Interface, Multilayer, Standing wave, TEY, Total electron yield",

author = "Takeo Ejima and Yasuji Muramatsu and Hisataka Takenaka",

year = "2004",

month = dec,

day = "1",

doi = "10.1117/12.561199",

language = "English",

volume = "5538",

pages = "138--143",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Optical Constants of Materials for UV to X-Ray Wavelengths ; Conference date: 04-08-2004 Through 05-08-2004",

}

TY - JOUR

T1 - Angle-dependent total electron yield spectra in multilayer films for standing wave measurements

AU - Ejima, Takeo

AU - Muramatsu, Yasuji

AU - Takenaka, Hisataka

PY - 2004/12/1

Y1 - 2004/12/1

N2 - By analyzing angle-dependent TEY spectra measured with fluorescence spectra, the depth-dependence of the absorbed energy in a Ru/B4C reflection multilayer film was obtained as follows. The periodic multilayer structure was obtained as [Ru 24.38Å/B4C 36.57Å] and [Ru 24.06Å/B4C 36.09Å] by GIXRD and reflectance measurements respectively. The angles of incidence of the fluorescence spectra were determined as 16° and 41° using the angle dependent TEY spectra measured with the fluorescence spectra. The depth-dependence of the absorbed energy, which represents the intensity of the fluorescence spectrum, was calculated using these parameters. These results suggest that an angle-dependent TEY measurement can be used as an easy phase-determination method for standing waves that are generated by a reflection multilayer.

AB - By analyzing angle-dependent TEY spectra measured with fluorescence spectra, the depth-dependence of the absorbed energy in a Ru/B4C reflection multilayer film was obtained as follows. The periodic multilayer structure was obtained as [Ru 24.38Å/B4C 36.57Å] and [Ru 24.06Å/B4C 36.09Å] by GIXRD and reflectance measurements respectively. The angles of incidence of the fluorescence spectra were determined as 16° and 41° using the angle dependent TEY spectra measured with the fluorescence spectra. The depth-dependence of the absorbed energy, which represents the intensity of the fluorescence spectrum, was calculated using these parameters. These results suggest that an angle-dependent TEY measurement can be used as an easy phase-determination method for standing waves that are generated by a reflection multilayer.

KW - Angle-dependence

KW - Fluorescence

KW - Interface

KW - Multilayer

KW - Standing wave

KW - TEY

KW - Total electron yield

UR - http://www.scopus.com/inward/record.url?scp=15844371578&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=15844371578&partnerID=8YFLogxK

U2 - 10.1117/12.561199

DO - 10.1117/12.561199

M3 - Conference article

AN - SCOPUS:15844371578

VL - 5538

SP - 138

EP - 143

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

M1 - 17

T2 - Optical Constants of Materials for UV to X-Ray Wavelengths

Y2 - 4 August 2004 through 5 August 2004

ER -

Angle-dependent total electron yield spectra in multilayer films for standing wave measurements

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this