Angle-dependent total electron yield spectra in multilayer films for standing wave measurements

Takeo Ejima, Yasuji Muramatsu, Hisataka Takenaka

Research output: Contribution to journalConference articlepeer-review

Abstract

By analyzing angle-dependent TEY spectra measured with fluorescence spectra, the depth-dependence of the absorbed energy in a Ru/B4C reflection multilayer film was obtained as follows. The periodic multilayer structure was obtained as [Ru 24.38Å/B4C 36.57Å] and [Ru 24.06Å/B4C 36.09Å] by GIXRD and reflectance measurements respectively. The angles of incidence of the fluorescence spectra were determined as 16° and 41° using the angle dependent TEY spectra measured with the fluorescence spectra. The depth-dependence of the absorbed energy, which represents the intensity of the fluorescence spectrum, was calculated using these parameters. These results suggest that an angle-dependent TEY measurement can be used as an easy phase-determination method for standing waves that are generated by a reflection multilayer.

Original languageEnglish
Article number17
Pages (from-to)138-143
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5538
DOIs
Publication statusPublished - 2004 Dec 1
EventOptical Constants of Materials for UV to X-Ray Wavelengths - Denver, CO, United States
Duration: 2004 Aug 42004 Aug 5

Keywords

  • Angle-dependence
  • Fluorescence
  • Interface
  • Multilayer
  • Standing wave
  • TEY
  • Total electron yield

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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