Analytical modeling of micromachined resonator sensor activated by cw laser irradiation

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Abstract

Analytical modeling of micromachined mechanical resonator sensor selfexcited by cw laser irradiation is presented. The optical feedback through the photothermal effect in the interference fringe generates the selfexcited vibration of the micromachined beams. The optical interference, thermal diffusion in the resonator and mechanical dynamics of the resonator are combined to maintain the oscillation. From the analysis, the following phenomena of the selfexcited vibration have been explained: (1) Threshold in light intensity to generate the vibration, (2) Saturation of the vibration amplitude, (3) Periodicity of the vibration excitation as a function of the displacement of the feedback mirror, (4) Bistability of the vibration center, (5) Frequency shift of the vibration.

Original languageEnglish
Pages105-108
Number of pages4
Publication statusPublished - 1997 Jan 1
EventProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2) - Chicago, IL, USA
Duration: 1997 Jun 161997 Jun 19

Other

OtherProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2)
CityChicago, IL, USA
Period97/6/1697/6/19

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Hane, K. (1997). Analytical modeling of micromachined resonator sensor activated by cw laser irradiation. 105-108. Paper presented at Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 1 (of 2), Chicago, IL, USA, .