Analytical designing of two-aspherical-mirror anastigmats permitting practical misalignments in a soft-X-ray optics

Mitsunori Toyoda, Masaki Yamamoto

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

A new analytical method of designing two-aspherical-mirror anastigmats was developed and applied to searching solution groups of soft X-ray microscopes of a large misalignment tolerance. The two-mirror anastigmat configurations were expressed by a practical variable related to pupil obstruction limiting the system throughput. Axial coma and other aberrations caused by a slight decenter of the system were then formulated to represent sensitivity to misalignment. These formulations enabled a global survey of solution groups as demonstrated by a designing example of soft X-ray microscopes with a magnification m = -1/50, which resulted in four solutions more insensitive to misalignment than a standard Schwarzschild optics in the soft X-ray region. Some solutions were also found to have much larger fields of view suitable for high resolution imaging as confirmed by computer ray tracing.

Original languageEnglish
Pages (from-to)149-157
Number of pages9
JournalOptical Review
Volume13
Issue number3
DOIs
Publication statusPublished - 2006 May 1

Keywords

  • Anastigmat
  • Aspherical mirror
  • Microscope
  • Misalignment
  • Soft X-ray

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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