Analytical designing of two-aspherical-mirror anastigmats permitting practical misalignments in a soft-X-ray optics

Mitsunori Toyoda, Masaki Yamamoto

    Research output: Contribution to journalArticlepeer-review

    8 Citations (Scopus)

    Abstract

    A new analytical method of designing two-aspherical-mirror anastigmats was developed and applied to searching solution groups of soft X-ray microscopes of a large misalignment tolerance. The two-mirror anastigmat configurations were expressed by a practical variable related to pupil obstruction limiting the system throughput. Axial coma and other aberrations caused by a slight decenter of the system were then formulated to represent sensitivity to misalignment. These formulations enabled a global survey of solution groups as demonstrated by a designing example of soft X-ray microscopes with a magnification m = -1/50, which resulted in four solutions more insensitive to misalignment than a standard Schwarzschild optics in the soft X-ray region. Some solutions were also found to have much larger fields of view suitable for high resolution imaging as confirmed by computer ray tracing.

    Original languageEnglish
    Pages (from-to)149-157
    Number of pages9
    JournalOptical Review
    Volume13
    Issue number3
    DOIs
    Publication statusPublished - 2006 May 1

    Keywords

    • Anastigmat
    • Aspherical mirror
    • Microscope
    • Misalignment
    • Soft X-ray

    ASJC Scopus subject areas

    • Atomic and Molecular Physics, and Optics

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