Analysis of voltage coefficient and leakage current of LA2O3 MIM capacitor

Akira Fukuyama, Kuniyuki Kakushima, Parhat Ahmet, A. N. Chandorkar, Kazuo Tsutsui, Nobuyuki Sugii, Takeo Hattori, Hiroshi Iwai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Engineering & Materials Science