Analysis of voltage coefficient and leakage current of LA2O3 MIM capacitor

Akira Fukuyama, Kuniyuki Kakushima, Parhat Ahmet, A. N. Chandorkar, Kazuo Tsutsui, Nobuyuki Sugii, Takeo Hattori, Hiroshi Iwai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Pt/La 2O 3/Pt MIM (Metal-Insulator-Metal) capacitor was fabricated and its electrical characteristics were evaluated. Relation with voltage coefficients of the C-V curve (α and β) and 1/C and J was investigated. It was found that a has a strong correlation with 1/C, while β has no obvious correlation. Annealing temperature dependence of the leakage mechanism was studied. It was found that, under low electric field, the conduction is governed by Schottky, while, under high electric field, the conduction is Fowler-Nordheim (F-N) type. With high annealing temperature at 500°C, Poole-Frenkel (P-F) conduction appears between the Schottky and Fowler-Nordheim electric field regions.

Original languageEnglish
Title of host publicationProceedings of the 5th International Conference on Semiconductor Technology, ISTC 2006
Pages225-231
Number of pages7
Publication statusPublished - 2006
Externally publishedYes
Event5th International Conference on Semiconductor Technology, ISTC 2006 - Shanghai, China
Duration: 2006 Mar 212006 Mar 23

Publication series

NameProceedings - Electrochemical Society
VolumePV 2006-03

Other

Other5th International Conference on Semiconductor Technology, ISTC 2006
CountryChina
CityShanghai
Period06/3/2106/3/23

ASJC Scopus subject areas

  • Engineering(all)

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