Analysis of thin electroplated layers by the bias-current controlled R.F. glow discharge optical emission spectrometry

Noboru Yamashita, Fumio Hiramoto, Kazuaki Wagatsuma

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

In radio-frequency glow discharge optical emission spectrometry (r.f. GD-OES), a bias-current conduction technique has been successfully applied to the analytical application with higher detection sensitivity. The d.c. bias current can introduce a great many electrons into the plasma thus leading to an enhancement in the emission intensities through the collisional excitations, whereas the sputtering rate is reduced due to the decreased d.c. bias voltages. This feature can be utilized to improve the information depth in depth profiling by r.f. GD-OES, because of the lower sampling rate as well as the better sensitivity. When nickel electroplated steel sheets were analyzed, the integrated intensities increased by a factor of 30 or more. The information depth in the coating weight analysis could be reduced about 20-fold, compared to that obtained with the conventional measurement.

Original languageEnglish
Pages (from-to)44-47
Number of pages4
JournalTetsu-To-Hagane/Journal of the Iron and Steel Institute of Japan
Volume88
Issue number1
DOIs
Publication statusPublished - 2002 Jan
Externally publishedYes

Keywords

  • Bias-current control
  • Coating weight
  • Nickel electroplated steel sheet
  • Optical emission spectrometry
  • Radio-frequency glow discharge

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Physical and Theoretical Chemistry
  • Metals and Alloys
  • Materials Chemistry

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