Analysis of thermal parameters and factors acting on thermal conduction of low-k films (Surface and Interface Analysis (October 2008) (1362-1366) DOI: 10.1002/sia.2908)

Shigeo Sato, Takao Okamura, Jiping Ye

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)264
Number of pages1
JournalSurface and Interface Analysis
Issue number3
Publication statusPublished - 2009 Mar

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Materials Chemistry
  • Surfaces, Coatings and Films

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