Analysis of the inductance and the stray capacitance of the dry-etched micro inductors

M. Yamaguchi, M. Matsumoto, H. Ohzeki, K. I. Arai

Research output: Contribution to journalArticlepeer-review

34 Citations (Scopus)

Abstract

Thin film inductors with meander coil or spiral coil were examined systematically. The minimum line spacing of the Inductors was 1.5um. In case of air core Inductors, both inductance and stray capacitance are calculated from the dimension of the inductors and they agreed very well with measured ones. With the application of magnetic thin film, the inductance is increased and the degree of increase was proportional to the length of the coil. It is found that the capacitance between conductor and magnetic film is very significant and needs special consideration.

Original languageEnglish
Pages (from-to)5274-5276
Number of pages3
JournalIEEE Transactions on Magnetics
Volume27
Issue number6
DOIs
Publication statusPublished - 1991 Nov

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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