@inproceedings{f18f157e5b164559a6e291badb5467b9,
title = "Analysis of RF plasma using electrical equivalent circuit",
author = "Masaki Hirayama and Kazuhide Ino and Tadahiro Ohmi",
year = "1995",
doi = "10.1109/ISSM.1995.524408",
language = "English",
series = "IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "283--286",
booktitle = "1995 IEEE/UCS/SEMI International Symposium on Semiconductor Manufacturing, ISSM 1995",
note = "1995 IEEE/UCS/SEMI International Symposium on Semiconductor Manufacturing, ISSM 1995 ; Conference date: 17-09-1995 Through 19-09-1995",
}