Analysis of hundreds of time constant ratios and amplitudes of random telegraph signal with very large scale array test pattern

Takafumi Fujisawa, Kenichi Abe, Shunichi Watabe, Naoto Miyamoto, Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Random telegraph signal (RTS) noise shows discrete and stochastic switching in two or more states at a drain current or threshold voltage. The capture and emission of carriers in individual traps near a silicon-gate insulator film interface induce RTS noise phenomena. RTS noise has become a crucial problem in analog devices and other devices. To suppress RTS noise, it is necessary to determine the energy level of traps. Time constant ratio has a strong relationship with the energy level of traps in gate insulator films. In this paper, we extract a large number of RTS data sets with large-scale array test patterns and evaluate the gate-bias voltage dependences of time constant ratio and amplitude. We demonstrate that the energy level of traps distributes uniformly at a drain current of at least 0.1-1.0 μA.

Original languageEnglish
Article number04DC06
JournalJapanese journal of applied physics
Volume49
Issue number4 PART 2
DOIs
Publication statusPublished - 2010 Apr 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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